{"product_id":"ckd-fsm3-rapiflow-flow-sensor-lcd-stainless-voltage","title":"CKD FSM3 Rapiflow Flow Sensor (LCD, Stainless Body, 1-5V Output)","description":"\u003cp class=\"ps-intro\"\u003eCKD FSM3 Rapiflow compact thermal flow sensor (LCD, Stainless Body, 1-5V Output) for gases, with full-scale flow ranges from 500 mL\/min to 1000 L\/min.\u003c\/p\u003e\u003ch4 class=\"ps-h\"\u003eKey features\u003c\/h4\u003e\u003cul class=\"ps-feat\"\u003e\n\u003cli\u003eThermal MEMS flow sensor (platinum sensor chip on silicon) for clean air, compressed air and nitrogen\u003c\/li\u003e\n\u003cli\u003eFull-scale flow ranges from 500 mL\/min to 1000 L\/min, unidirectional or bidirectional measurement\u003c\/li\u003e\n\u003cli\u003eStainless steel body with Rc, G, NPT, 1\/4 in bite or JXR fittings; oxygen (oil-free) body 3 up to 200 L\/min\u003c\/li\u003e\n\u003cli\u003e4+4 digit 2-colour LCD with switch outputs, analog output, flow integration, peak hold and gas type switching\u003c\/li\u003e\n\u003cli\u003eNeedle valve (T) option on stainless LCD types; unit switching (unit 2) for export only\u003c\/li\u003e\n\u003cli\u003eOrder code shown with unit 1 (SI units) and valve option N; lead wire, bracket\/panel\/DIN rail mounting, inspection certificate (R, S) and clean specs P70\/P80 are added as suffixes, e.g. -BMR-P80\u003c\/li\u003e\n\u003c\/ul\u003e\u003ch4 class=\"ps-h\"\u003eSpecifications\u003c\/h4\u003e\u003ctable class=\"ps-kv\"\u003e\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003eDisplay\u003c\/th\u003e\n\u003ctd\u003e4+4 digit 2-colour LCD\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eApplicable fluid\u003c\/th\u003e\n\u003ctd\u003eClean dry air, compressed air, nitrogen, oxygen (body 3)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eOperating pressure\u003c\/th\u003e\n\u003ctd\u003e-0.09 to 1.00 MPa (to 200 L\/min), -0.09 to 0.75 MPa (500\/1000 L\/min)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eProof pressure\u003c\/th\u003e\n\u003ctd\u003e1.5 MPa\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eAccuracy\u003c\/th\u003e\n\u003ctd\u003e+\/-3% F.S. (repeatability +\/-1% F.S.)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eSwitch output\u003c\/th\u003e\n\u003ctd\u003eNPN or PNP open collector, 50 mA max.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eResponse time\u003c\/th\u003e\n\u003ctd\u003e50 ms or less\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003ePower supply\u003c\/th\u003e\n\u003ctd\u003e12-24 VDC (1-5V types); 24 VDC (4-20mA types)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eFluid \/ ambient temperature\u003c\/th\u003e\n\u003ctd\u003e0 to 50 C, 90% RH or less\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eProtection\u003c\/th\u003e\n\u003ctd\u003eIP40 equivalent (IEC)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eSource\u003c\/th\u003e\n\u003ctd\u003eCKD Korea catalog CB-024SK-9, p. 1466-1472\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\u003c\/table\u003e\u003ctable class=\"ps-src\"\u003e\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U2AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005U3AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B2AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L005B3AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U2AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010U3AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B2AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L010B3AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 mL\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U2AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020U3AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B2AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L020B3AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 2 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U2AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050U3AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B2AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L050B3AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 5 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U2AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100U3AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B2AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L100B3AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 10 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U2AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200U3AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B2AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L200B3AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 20 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U2BE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500U3BE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B2BE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/8 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/8 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3AE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (to 50 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L500B3BE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 50 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U2BE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101U3BE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B2BE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L101B3BE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 100 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U2BE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201U3BE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B2BE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: Rc1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: G1\/4 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: NPT1\/4 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BD1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BD1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BD1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BD1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in bite fitting (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BE1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BE1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BE1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L201B3BE1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 200 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, oxygen (oil-free) | Connection: 1\/4 in JXR male (50-200 L\/min) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501U2CA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/2 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501U2CA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/2 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501U2CA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/2 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501U2CA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/2 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501U2CF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501U2CF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501U2CF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501U2CF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501U2CB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501U2CB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501U2CB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501U2CB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501U2CC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/2 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501U2CC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/2 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501U2CC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/2 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501U2CC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/2 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501B2CA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/2 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501B2CA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/2 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501B2CA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/2 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501B2CA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/2 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501B2CF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501B2CF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501B2CF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501B2CF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501B2CB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501B2CB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501B2CB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501B2CB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501B2CC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/2 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501B2CC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/2 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501B2CC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/2 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L501B2CC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 500 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/2 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102U2CA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/2 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102U2CA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/2 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102U2CA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/2 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102U2CA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/2 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102U2CF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102U2CF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102U2CF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102U2CF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102U2CB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102U2CB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102U2CB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102U2CB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102U2CC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/2 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102U2CC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/2 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102U2CC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/2 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102U2CC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Unidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/2 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102B2CA1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/2 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102B2CA1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/2 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102B2CA1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/2 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102B2CA1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: Rc1\/2 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102B2CF1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (ISO 16030) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102B2CF1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (ISO 16030) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102B2CF1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (ISO 16030) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102B2CF1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (ISO 16030) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102B2CB1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102B2CB1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102B2CB1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (JIS B 2351-1 O-ring) | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102B2CB1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: G1\/2 (JIS B 2351-1 O-ring) | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102B2CC1A1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/2 | Output: 1-5V + 1 NPN, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102B2CC1B1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/2 | Output: 1-5V + 2 NPN\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102B2CC1C1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/2 | Output: 1-5V + 1 PNP, setting copy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFSM3-L102B2CC1D1N\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eFlow range: 1000 L\/min | Flow direction: Bidirectional | Body \/ fluid: SUS, air\/gas | Connection: NPT1\/2 | Output: 1-5V + 2 PNP\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\u003c\/table\u003e","brand":"CKD","offers":[{"title":"Default Title","offer_id":67524181786914,"sku":"FSM3-L005U2AA1A1N","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/1021\/0744\/7586\/files\/ckd-fsm3-rapiflow-flow-sensor-lcd-stainless-voltage.jpg?v=1791975010","url":"https:\/\/prosourcemro.com\/products\/ckd-fsm3-rapiflow-flow-sensor-lcd-stainless-voltage","provider":"ProSource MRO","version":"1.0","type":"link"}