{"product_id":"smc-hrz-f-thermo-chiller-inverter","title":"SMC HRZ-F Thermo-Chiller (Inverter Type, R410A\/R448A, 2 to 10 kW)","description":"\u003cp class=\"ps-intro\"\u003eSMC HRZ-F series water-cooled thermo-chiller with DC inverter refrigerator and inverter pump for semiconductor processes, handling fluorinated fluid, ethylene glycol or clear\/DI water over a wide -20 to 90 C range.\u003c\/p\u003e\u003ch4 class=\"ps-h\"\u003eKey features\u003c\/h4\u003e\u003cul class=\"ps-feat\"\u003e\n\u003cli\u003ePump \u0026amp; refrigerator inverter type (W...S) in 2, 4, 8 and 10 kW; pump inverter type HRZ008-L for -20 to 40 C\u003c\/li\u003e\n\u003cli\u003eCirculating fluids: fluorinated fluid (Fluorinert \/ GALDEN), 60% ethylene glycol aqueous solution, clear or DI water\u003c\/li\u003e\n\u003cli\u003eTemperature stability +\/-0.1 C, PID control; built-in flow control by pump inverter\u003c\/li\u003e\n\u003cli\u003eContact I\/O (D-sub 25P) and serial RS-485 (D-sub 9P) communication standard; SEMI, CE\/UKCA, UL compliant\u003c\/li\u003e\n\u003cli\u003eOption 1: C (analog communication), D (DeviceNet); option 2: N (NPT fitting), W (SI units fixed), Y (DI control kit), Z (circulating fluid auto recovery)\u003c\/li\u003e\n\u003c\/ul\u003e\u003ch4 class=\"ps-h\"\u003eSpecifications\u003c\/h4\u003e\u003ctable class=\"ps-kv\"\u003e\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003eCooling method\u003c\/th\u003e\n\u003ctd\u003eWater-cooled refrigeration, 1 channel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eRefrigerant\u003c\/th\u003e\n\u003ctd\u003eR410A (HFC) \/ R448A (HFC\/HFO, HRZ008-L)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eTemperature control\u003c\/th\u003e\n\u003ctd\u003ePID control\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eTemperature stability\u003c\/th\u003e\n\u003ctd\u003e+\/-0.1 C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003ePower supply\u003c\/th\u003e\n\u003ctd\u003e3-ph AC200\/200-208V (50\/60Hz)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eCirculating fluid ports\u003c\/th\u003e\n\u003ctd\u003eRc3\/4 (drain Rc3\/8)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eFacility water ports\u003c\/th\u003e\n\u003ctd\u003eRc1\/2\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eFacility water temperature\u003c\/th\u003e\n\u003ctd\u003e10 to 30 C (W type), 10 to 25 C (L type)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eAmbient\u003c\/th\u003e\n\u003ctd\u003e10 to 35 C, 30 to 70% RH\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003ePort thread\u003c\/th\u003e\n\u003ctd\u003eRc (NPT fittings: option N)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eSource\u003c\/th\u003e\n\u003ctd\u003eSMC Korea catalog HRZ-F (SMCKR_HRZ-F.pdf), p. 10-14\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\u003c\/table\u003e\u003ctable class=\"ps-src\"\u003e\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003eHRZ002-WS-F\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eType: Pump \u0026amp; refrigerator inverter | Circulating fluid: Fluorinated fluid | Cooling capacity: 2 kW (0.5 kW at -10 C) | Set temp range: -10 to 90 C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHRZ004-WS-F\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eType: Pump \u0026amp; refrigerator inverter | Circulating fluid: Fluorinated fluid | Cooling capacity: 4 kW (2 kW at -10 C) | Set temp range: -20 to 90 C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHRZ008-WS-F\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eType: Pump \u0026amp; refrigerator inverter | Circulating fluid: Fluorinated fluid | Cooling capacity: 8 kW (4 kW at -10 C) | Set temp range: -20 to 90 C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHRZ010-WS-F\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eType: Pump \u0026amp; refrigerator inverter | Circulating fluid: Fluorinated fluid | Cooling capacity: 10 kW (4 kW at -10 C) | Set temp range: -20 to 90 C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHRZ002-W1S-F\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eType: Pump \u0026amp; refrigerator inverter | Circulating fluid: 60% ethylene glycol | Cooling capacity: 2 kW | Set temp range: -10 to 90 C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHRZ004-W1S-F\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eType: Pump \u0026amp; refrigerator inverter | Circulating fluid: 60% ethylene glycol | Cooling capacity: 4 kW (2 kW at -10 C) | Set temp range: -20 to 90 C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHRZ008-W1S-F\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eType: Pump \u0026amp; refrigerator inverter | Circulating fluid: 60% ethylene glycol | Cooling capacity: 8 kW (4 kW at -10 C) | Set temp range: -20 to 90 C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHRZ010-W1S-F\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eType: Pump \u0026amp; refrigerator inverter | Circulating fluid: 60% ethylene glycol | Cooling capacity: 10 kW (4 kW at -10 C) | Set temp range: -20 to 90 C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHRZ002-W2S-F\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eType: Pump \u0026amp; refrigerator inverter | Circulating fluid: Clear water \/ DI water | Cooling capacity: 2 kW | Set temp range: 10 to 60 C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHRZ004-W2S-F\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eType: Pump \u0026amp; refrigerator inverter | Circulating fluid: Clear water \/ DI water | Cooling capacity: 4 kW | Set temp range: 10 to 60 C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHRZ008-W2S-F\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eType: Pump \u0026amp; refrigerator inverter | Circulating fluid: Clear water \/ DI water | Cooling capacity: 8 kW | Set temp range: 10 to 60 C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHRZ010-W2S-F\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eType: Pump \u0026amp; refrigerator inverter | Circulating fluid: Clear water \/ DI water | Cooling capacity: 10 kW | Set temp range: 10 to 60 C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHRZ008-L-F\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eType: Pump inverter | Circulating fluid: Fluorinated fluid | Cooling capacity: 8 kW (at -10 C) | Set temp range: -20 to 40 C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHRZ008-L1-F\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eType: Pump inverter | Circulating fluid: 60% ethylene glycol | Cooling capacity: 8 kW (at -10 C) | Set temp range: -20 to 40 C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\u003c\/table\u003e","brand":"SMC","offers":[{"title":"Default Title","offer_id":67521694728482,"sku":"HRZ-F","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/1021\/0744\/7586\/files\/smc-hrz-f-thermo-chiller-inverter.jpg?v=1791950339","url":"https:\/\/prosourcemro.com\/products\/smc-hrz-f-thermo-chiller-inverter","provider":"ProSource MRO","version":"1.0","type":"link"}