{"product_id":"smc-sfc-clean-gas-filter-multi-disk","title":"SMC SFC Clean Gas Filter (Non-reusable, Multi-disk, 240 L\/min)","description":"\u003cp class=\"ps-intro\"\u003eSMC SFC100 series non-reusable multi-disk clean gas filter with high-reliability PTFE membrane (0.01 um, 99.99%) for compressed air and nitrogen in semiconductor processes, 240 L\/min (ANR).\u003c\/p\u003e\u003ch4 class=\"ps-h\"\u003eKey features\u003c\/h4\u003e\u003cul class=\"ps-feat\"\u003e\n\u003cli\u003eMulti-stage disk PTFE membrane element, filtration area 300 cm2, rated flow 240 L\/min (ANR)\u003c\/li\u003e\n\u003cli\u003eSUS316 case electropolished inside and outside; PTFE\/PVDF element, PTFE O-ring\u003c\/li\u003e\n\u003cli\u003eHelium leak 4.0x10-9 Pa m3\/s or less; operating temperature up to 120 C\u003c\/li\u003e\n\u003cli\u003eRc, TSJ (tube swage joint) or URJ (metal gasket union ring joint) connections in 1\/4 and 3\/8\u003c\/li\u003e\n\u003cli\u003eCleaned, assembled, inspected and double-bagged (antistatic) in a clean room\u003c\/li\u003e\n\u003c\/ul\u003e\u003ch4 class=\"ps-h\"\u003eSpecifications\u003c\/h4\u003e\u003ctable class=\"ps-kv\"\u003e\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003eFluid\u003c\/th\u003e\n\u003ctd\u003eAir, nitrogen\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eOperating pressure\u003c\/th\u003e\n\u003ctd\u003eMax. 0.99 MPa, vacuum 1.3x10-6 kPa\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eOperating temperature\u003c\/th\u003e\n\u003ctd\u003e5 to 120 C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eElement differential pressure\u003c\/th\u003e\n\u003ctd\u003eMax. 0.42 MPa\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eElement reverse differential pressure\u003c\/th\u003e\n\u003ctd\u003eMax. 0.07 MPa\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eFiltration\u003c\/th\u003e\n\u003ctd\u003e0.01 um (99.99% capture)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eRated flow\u003c\/th\u003e\n\u003ctd\u003e240 L\/min (ANR)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eCase material\u003c\/th\u003e\n\u003ctd\u003eSUS316 (electropolished)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eMass\u003c\/th\u003e\n\u003ctd\u003e0.35 to 0.49 kg\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eSource\u003c\/th\u003e\n\u003ctd\u003eSMC Korea catalog SF Series (SMCKR_SFA_SFB_SFC.pdf), p. 415-417 (PDF p. 15-17)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\u003c\/table\u003e\u003ctable class=\"ps-src\"\u003e\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003eSFC100-02\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eConnection: Rc1\/4 female | Connection size: 1\/4 | Mass: 0.35 kg\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSFC100-03\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eConnection: Rc3\/8 female | Connection size: 3\/8 | Mass: 0.36 kg\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSFC102-02\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eConnection: TSJ1\/4 swage joint | Connection size: 1\/4 | Mass: 0.40 kg\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSFC102-03\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eConnection: TSJ3\/8 swage joint | Connection size: 3\/8 | Mass: 0.41 kg\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSFC105-02\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eConnection: URJ1\/4 ring union | Connection size: 1\/4 | Mass: 0.44 kg\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSFC105-03\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eConnection: URJ3\/8 ring union | Connection size: 3\/8 | Mass: 0.49 kg\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\u003c\/table\u003e","brand":"SMC","offers":[{"title":"Default Title","offer_id":67521636335906,"sku":"SFC","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/1021\/0744\/7586\/files\/smc-sfc-clean-gas-filter-multi-disk.jpg?v=1791950394","url":"https:\/\/prosourcemro.com\/products\/smc-sfc-clean-gas-filter-multi-disk","provider":"ProSource MRO","version":"1.0","type":"link"}