{"product_id":"smc-sl5200-high-purity-miniature-regulator","title":"SMC SL5200 High-Purity Miniature Regulator (Springless, Single-Stage)","description":"\u003cp class=\"ps-intro\"\u003eSMC SL5200 series compact single-stage high-purity regulator with springless (no poppet spring in the gas path) construction, standard flow below 30 slpm.\u003c\/p\u003e\u003ch4 class=\"ps-h\"\u003eKey features\u003c\/h4\u003e\u003cul class=\"ps-feat\"\u003e\n\u003cli\u003eHigh-purity SUS316L double-melt body, electropolished and passivated; precision cleaned and helium leak tested\u003c\/li\u003e\n\u003cli\u003eSpringless construction: no poppet spring in the wetted area\u003c\/li\u003e\n\u003cli\u003eFlow below 30 slpm (HF option below 130 slpm); inlet up to 150 psig (1.0 MPa)\u003c\/li\u003e\n\u003cli\u003eSet pressure 0.0034-0.07 to 0.007-0.7 MPa; vacuum-regulation version SL5201..A (-88 kPa to 0.07 MPa)\u003c\/li\u003e\n\u003cli\u003e2-port or 3-port (outlet gauge) bodies with 1\/4 or 3\/8 face seal or tube weld connections\u003c\/li\u003e\n\u003cli\u003eListed codes: gauge ports \"0\" (1\/4 face seal male port, no gauge); gauges (V3, L, 1, H, 2, 4, 40), MPA scale, VS\/TF seat, HF high-flow and panel mount (P) are ordered as suffixes\u003c\/li\u003e\n\u003c\/ul\u003e\u003ch4 class=\"ps-h\"\u003eSpecifications\u003c\/h4\u003e\u003ctable class=\"ps-kv\"\u003e\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003eFluid\u003c\/th\u003e\n\u003ctd\u003eGases that do not corrode wetted parts\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eLeakage\u003c\/th\u003e\n\u003ctd\u003eInboard 2x10^-11, outboard 2x10^-10 Pa m3\/s\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eAmbient and fluid temperature\u003c\/th\u003e\n\u003ctd\u003e-40 to 71 C (no freezing)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eInternal finish\u003c\/th\u003e\n\u003ctd\u003eRa max 0.25 um, M (options 0.18\/0.13 um)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eInlet pressure\u003c\/th\u003e\n\u003ctd\u003eVacuum to 1.0 MPa\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eInternal volume\u003c\/th\u003e\n\u003ctd\u003e3.1 cm3\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eMass\u003c\/th\u003e\n\u003ctd\u003e0.45 kg\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eSource\u003c\/th\u003e\n\u003ctd\u003eSMC Korea catalog Process Gas Equipment (SMCKR_AP_SL_AZ_AK_BP.pdf), p. 688-689\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\u003c\/table\u003e\u003ctable class=\"ps-src\"\u003e\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SM2PWFV4FV4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1\/4 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SM2PWMV4MV4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1\/4 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SM2PWTW4TW4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1\/4 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SM2PWFV6FV6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3\/8 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SM2PWMV6MV6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3\/8 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SM2PWTW6TW6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3\/8 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SM3PWFV4FV40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1\/4 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SM3PWMV4MV40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1\/4 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SM3PWTW4TW40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1\/4 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SM3PWFV6FV60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3\/8 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SM3PWMV6MV60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3\/8 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SM3PWTW6TW60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3\/8 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHM2PWFV4FV4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1\/4 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHM2PWMV4MV4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1\/4 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHM2PWTW4TW4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1\/4 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHM2PWFV6FV6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3\/8 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHM2PWMV6MV6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3\/8 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHM2PWTW6TW6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3\/8 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHM3PWFV4FV40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1\/4 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHM3PWMV4MV40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1\/4 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHM3PWTW4TW40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1\/4 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHM3PWFV6FV60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3\/8 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHM3PWMV6MV60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3\/8 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHM3PWTW6TW60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3\/8 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SM2PWFV4FV4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1\/4 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SM2PWMV4MV4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1\/4 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SM2PWTW4TW4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1\/4 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SM2PWFV6FV6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3\/8 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SM2PWMV6MV6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3\/8 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SM2PWTW6TW6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3\/8 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SM3PWFV4FV40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1\/4 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SM3PWMV4MV40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1\/4 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SM3PWTW4TW40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1\/4 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SM3PWFV6FV60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3\/8 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SM3PWMV6MV60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3\/8 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SM3PWTW6TW60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3\/8 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SHM2PWFV4FV4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1\/4 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SHM2PWMV4MV4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1\/4 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SHM2PWTW4TW4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1\/4 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SHM2PWFV6FV6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3\/8 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SHM2PWMV6MV6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3\/8 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SHM2PWTW6TW6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3\/8 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SHM3PWFV4FV40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1\/4 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SHM3PWMV4MV40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1\/4 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SHM3PWTW4TW40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1\/4 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SHM3PWFV6FV60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3\/8 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SHM3PWMV6MV60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3\/8 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5202SHM3PWTW6TW60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3\/8 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SM2PWFV4FV4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1\/4 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SM2PWMV4MV4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1\/4 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SM2PWTW4TW4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1\/4 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SM2PWFV6FV6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3\/8 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SM2PWMV6MV6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3\/8 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SM2PWTW6TW6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3\/8 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SM3PWFV4FV40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1\/4 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SM3PWMV4MV40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1\/4 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SM3PWTW4TW40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1\/4 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SM3PWFV6FV60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3\/8 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SM3PWMV6MV60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3\/8 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SM3PWTW6TW60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3\/8 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SHM2PWFV4FV4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1\/4 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SHM2PWMV4MV4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1\/4 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SHM2PWTW4TW4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1\/4 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SHM2PWFV6FV6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3\/8 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SHM2PWMV6MV6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3\/8 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SHM2PWTW6TW6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3\/8 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SHM3PWFV4FV40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1\/4 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SHM3PWMV4MV40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1\/4 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SHM3PWTW4TW40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1\/4 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SHM3PWFV6FV60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3\/8 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SHM3PWMV6MV60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3\/8 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5206SHM3PWTW6TW60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3\/8 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SM2PWFV4FV4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1\/4 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SM2PWMV4MV4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1\/4 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SM2PWTW4TW4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1\/4 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SM2PWFV6FV6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3\/8 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SM2PWMV6MV6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3\/8 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SM2PWTW6TW6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3\/8 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SM3PWFV4FV40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1\/4 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SM3PWMV4MV40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1\/4 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SM3PWTW4TW40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1\/4 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SM3PWFV6FV60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3\/8 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SM3PWMV6MV60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3\/8 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SM3PWTW6TW60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3\/8 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SHM2PWFV4FV4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1\/4 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SHM2PWMV4MV4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1\/4 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SHM2PWTW4TW4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1\/4 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SHM2PWFV6FV6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3\/8 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SHM2PWMV6MV6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3\/8 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SHM2PWTW6TW6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3\/8 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SHM3PWFV4FV40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1\/4 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SHM3PWMV4MV40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1\/4 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SHM3PWTW4TW40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1\/4 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SHM3PWFV6FV60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3\/8 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SHM3PWMV6MV60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3\/8 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5210SHM3PWTW6TW60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3\/8 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SMA2PWFV4FV4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1\/4 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SMA2PWMV4MV4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1\/4 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SMA2PWTW4TW4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1\/4 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SMA2PWFV6FV6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3\/8 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SMA2PWMV6MV6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3\/8 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SMA2PWTW6TW6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3\/8 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SMA3PWFV4FV40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1\/4 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SMA3PWMV4MV40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1\/4 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SMA3PWTW4TW40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1\/4 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SMA3PWFV6FV60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3\/8 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SMA3PWMV6MV60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3\/8 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SMA3PWTW6TW60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3\/8 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHMA2PWFV4FV4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1\/4 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHMA2PWMV4MV4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1\/4 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHMA2PWTW4TW4\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1\/4 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHMA2PWFV6FV6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3\/8 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHMA2PWMV6MV6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3\/8 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHMA2PWTW6TW6\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3\/8 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHMA3PWFV4FV40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1\/4 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHMA3PWMV4MV40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1\/4 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHMA3PWTW4TW40\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1\/4 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHMA3PWFV6FV60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3\/8 face seal female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHMA3PWMV6MV60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3\/8 face seal male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSL5201SHMA3PWTW6TW60\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eSet pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3\/8 tube weld\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\u003c\/table\u003e","brand":"SMC","offers":[{"title":"Default Title","offer_id":67521704558882,"sku":"SL5200","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/1021\/0744\/7586\/files\/smc-sl5200-high-purity-miniature-regulator.jpg?v=1791950393","url":"https:\/\/prosourcemro.com\/products\/smc-sl5200-high-purity-miniature-regulator","provider":"ProSource MRO","version":"1.0","type":"link"}