{"product_id":"smc-xgt-slit-valve","title":"SMC XGT High Vacuum Slit Valve (200\/300 mm Wafer)","description":"\u003cp class=\"ps-intro\"\u003eSMC XGT high vacuum slit valve (gate valve) between load-lock and transfer chambers of semiconductor equipment, for 200 mm and 300 mm wafers.\u003c\/p\u003e\u003ch4 class=\"ps-h\"\u003eKey features\u003c\/h4\u003e\u003cul class=\"ps-feat\"\u003e\n\u003cli\u003eL-motion gate with end lock: holds open or closed position at emergency stop\u003c\/li\u003e\n\u003cli\u003eService life 2 million cycles (SMC test conditions)\u003c\/li\u003e\n\u003cli\u003eCassette type for quick gate maintenance, or no-cassette type\u003c\/li\u003e\n\u003cli\u003eGate O-ring FKM or Kalrez 4079\u003c\/li\u003e\n\u003cli\u003eAuto switch D-A93 with lead, multi-connector or D-sub (A\/C\/F suffix), not expanded\u003c\/li\u003e\n\u003c\/ul\u003e\u003ch4 class=\"ps-h\"\u003eSpecifications\u003c\/h4\u003e\u003ctable class=\"ps-kv\"\u003e\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003eOperating pressure\u003c\/th\u003e\n\u003ctd\u003eAtmospheric to 10^-6 Pa(abs)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eDifferential pressure\u003c\/th\u003e\n\u003ctd\u003e4 kPa or less\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003ePilot pressure\u003c\/th\u003e\n\u003ctd\u003e0.45-0.6 MPa\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eExternal leakage\u003c\/th\u003e\n\u003ctd\u003e6.5x10^-11 Pa m3\/s\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eInternal leakage\u003c\/th\u003e\n\u003ctd\u003e6.5x10^-10 (FKM), 6.5x10^-9 (Kalrez) Pa m3\/s\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eFluid\u003c\/th\u003e\n\u003ctd\u003eInert gas\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eMaterials\u003c\/th\u003e\n\u003ctd\u003eBellows AM350, gate A6063, body A5052\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eMounting\u003c\/th\u003e\n\u003ctd\u003eVertical\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003cth\u003eSource\u003c\/th\u003e\n\u003ctd\u003eSMC Korea XGT catalog (SMCKR_XGT.pdf), p. 3-4\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\u003c\/table\u003e\u003ctable class=\"ps-src\"\u003e\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT221-32222-1\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: No cassette | Opening: 32 x 222 mm | Gate O ring: FKM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT221-32222-2\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: No cassette | Opening: 32 x 222 mm | Gate O ring: Kalrez 4079\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT221-32222-F1\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: No cassette | Opening: 32 x 222 mm | Gate O ring: FKM (std FKM equiv.)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT222-32222-1\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 32 x 222 mm | Gate O ring: FKM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT222-32222-2\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 32 x 222 mm | Gate O ring: Kalrez 4079\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT222-32222-F1\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 32 x 222 mm | Gate O ring: FKM (std FKM equiv.)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT222-32222-F2\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 32 x 222 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT221-46236-1\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: No cassette | Opening: 46 x 236 mm | Gate O ring: FKM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT221-46236-2\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: No cassette | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT221-46236-F1\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: No cassette | Opening: 46 x 236 mm | Gate O ring: FKM (std FKM equiv.)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT222-46236-1\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 46 x 236 mm | Gate O ring: FKM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT222-46236-2\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT222-46236-F1\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 46 x 236 mm | Gate O ring: FKM (std FKM equiv.)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT222-46236-F2\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT223-46236-1\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Half MESK | Opening: 46 x 236 mm | Gate O ring: FKM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT223-46236-2\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Half MESK | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT223-46236-F1\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Half MESK | Opening: 46 x 236 mm | Gate O ring: FKM (std FKM equiv.)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT223-46236-F2\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Half MESK | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT224-46236-1\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Full MESK | Opening: 46 x 236 mm | Gate O ring: FKM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT224-46236-2\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Full MESK | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT224-46236-F1\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Full MESK | Opening: 46 x 236 mm | Gate O ring: FKM (std FKM equiv.)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT224-46236-F2\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Full MESK | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT311-50336-1\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 1-axis bellows, 300 mm wafer | Valve type: No cassette | Opening: 50 x 336 mm | Gate O ring: FKM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT311-50336-2\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 1-axis bellows, 300 mm wafer | Valve type: No cassette | Opening: 50 x 336 mm | Gate O ring: Kalrez 4079\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT311-50336-F1\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 1-axis bellows, 300 mm wafer | Valve type: No cassette | Opening: 50 x 336 mm | Gate O ring: FKM (std FKM equiv.)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT311-50336-F2\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 1-axis bellows, 300 mm wafer | Valve type: No cassette | Opening: 50 x 336 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT312-50336-1\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, standard | Opening: 50 x 336 mm | Gate O ring: FKM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT312-50336-2\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, standard | Opening: 50 x 336 mm | Gate O ring: Kalrez 4079\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT312-50336-F1\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, standard | Opening: 50 x 336 mm | Gate O ring: FKM (std FKM equiv.)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT312-50336-F2\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, standard | Opening: 50 x 336 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT313-50336-1\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, Half MESK | Opening: 50 x 336 mm | Gate O ring: FKM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT313-50336-2\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, Half MESK | Opening: 50 x 336 mm | Gate O ring: Kalrez 4079\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT313-50336-F1\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, Half MESK | Opening: 50 x 336 mm | Gate O ring: FKM (std FKM equiv.)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eXGT313-50336-F2\u003c\/td\u003e\n\u003ctd\u003e\u003c\/td\u003e\n\u003ctd\u003eValve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, Half MESK | Opening: 50 x 336 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\u003c\/table\u003e","brand":"SMC","offers":[{"title":"Default Title","offer_id":67521755316514,"sku":"XGT","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/1021\/0744\/7586\/files\/smc-xgt-slit-valve.jpg?v=1791950423","url":"https:\/\/prosourcemro.com\/products\/smc-xgt-slit-valve","provider":"ProSource MRO","version":"1.0","type":"link"}