CKD FSM2 Rapiflow Flow Sensor, Display-Integrated (Clean P70/P80)

CKD FSM2 Rapiflow compact thermal flow sensor with integrated 4+4-digit LCD, 2 switch outputs and analog output, optionally with built-in needle valve, in P70/P80 clean specs.

Key features

Full scale 500 mL/min to 1000 L/min; unidirectional or bidirectional (-100 to 100% F.S.) measurement
Resin body with ø4-ø10 push-in, stainless body Rc1/8-1/4 (low out-gassing, Ar/CO2 types), aluminium Rc1/2
Needle-valve-integrated type (N) for flow adjustment at the sensor; NPN or PNP x2 plus 1-5 V or 4-20 mA
Integrated pulse output for air consumption monitoring; platinum MEMS sensor chip for fast response
Options not multiplied: cable 1/3 m (1, 3), bracket B, panel kit P, traceability T/K; SM5 port made to order

Specifications

Fluid	Clean air, compressed air, N2 (S body also Ar, CO2)
Max. operating pressure	0.7 MPa
Proof pressure	1 MPa
Ambient / fluid temperature	0 to 50°C
Accuracy	±3% F.S.
Response time	50 ms max.
Supply voltage	DC12-24V (V output) / DC24V (A output)
Source	CKD Korea catalog CB-033S-4, p. 1048-1103

FSM2-NVF005-H04-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF005-H04N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR005-H04-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF005-H04-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF005-H04N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR005-H04-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF005-H04-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF005-H04N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR005-H04-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF005-H04-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF005-H04N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR005-H04-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF005-H04-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF005-H04N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR005-H04-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF005-H04-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF005-H04N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR005-H04-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF005-H04-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF005-H04N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR005-H04-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF005-H04-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF005-H04N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR005-H04-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF005-H06-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF005-H06N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR005-H06-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF005-H06-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF005-H06N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR005-H06-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF005-H06-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF005-H06N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR005-H06-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF005-H06-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF005-H06N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR005-H06-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF005-H06-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF005-H06N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR005-H06-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF005-H06-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF005-H06N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR005-H06-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF005-H06-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF005-H06N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR005-H06-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF005-H06-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF005-H06N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR005-H06-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF005-S06-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF005-S06N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR005-S06-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF005-S06-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF005-S06N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR005-S06-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF005-S06-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF005-S06N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR005-S06-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF005-S06-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF005-S06N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR005-S06-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF005-S06-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF005-S06N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR005-S06-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF005-S06-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF005-S06N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR005-S06-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF005-S06-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF005-S06N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR005-S06-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF005-S06-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF005-S06N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR005-S06-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF005-S06AR-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NVF005-S06ARN-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR005-S06AR-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NAF005-S06AR-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NAF005-S06ARN-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR005-S06AR-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PVF005-S06AR-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PVF005-S06ARN-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR005-S06AR-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PAF005-S06AR-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PAF005-S06ARN-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR005-S06AR-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NVF005-S06AR-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NVF005-S06ARN-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-NVR005-S06AR-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NAF005-S06AR-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NAF005-S06ARN-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-NAR005-S06AR-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PVF005-S06AR-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PVF005-S06ARN-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-PVR005-S06AR-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PAF005-S06AR-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PAF005-S06ARN-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-PAR005-S06AR-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NVF005-S06C2-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NVF005-S06C2N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR005-S06C2-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NAF005-S06C2-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NAF005-S06C2N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR005-S06C2-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PVF005-S06C2-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PVF005-S06C2N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR005-S06C2-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PAF005-S06C2-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PAF005-S06C2N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR005-S06C2-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NVF005-S06C2-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NVF005-S06C2N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR005-S06C2-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NAF005-S06C2-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NAF005-S06C2N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR005-S06C2-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PVF005-S06C2-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PVF005-S06C2N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR005-S06C2-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PAF005-S06C2-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PAF005-S06C2N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR005-S06C2-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NVF010-H04-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF010-H04N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR010-H04-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF010-H04-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF010-H04N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR010-H04-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF010-H04-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF010-H04N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR010-H04-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF010-H04-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF010-H04N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR010-H04-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF010-H04-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF010-H04N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR010-H04-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF010-H04-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF010-H04N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR010-H04-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF010-H04-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF010-H04N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR010-H04-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF010-H04-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF010-H04N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR010-H04-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF010-H06-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF010-H06N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR010-H06-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF010-H06-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF010-H06N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR010-H06-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF010-H06-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF010-H06N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR010-H06-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF010-H06-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF010-H06N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR010-H06-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF010-H06-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF010-H06N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR010-H06-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF010-H06-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF010-H06N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR010-H06-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF010-H06-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF010-H06N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR010-H06-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF010-H06-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF010-H06N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR010-H06-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF010-S06-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF010-S06N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR010-S06-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF010-S06-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF010-S06N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR010-S06-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF010-S06-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF010-S06N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR010-S06-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF010-S06-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF010-S06N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR010-S06-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF010-S06-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF010-S06N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR010-S06-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF010-S06-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF010-S06N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR010-S06-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF010-S06-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF010-S06N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR010-S06-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF010-S06-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF010-S06N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR010-S06-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF010-S06AR-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NVF010-S06ARN-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR010-S06AR-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NAF010-S06AR-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NAF010-S06ARN-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR010-S06AR-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PVF010-S06AR-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PVF010-S06ARN-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR010-S06AR-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PAF010-S06AR-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PAF010-S06ARN-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR010-S06AR-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NVF010-S06AR-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NVF010-S06ARN-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-NVR010-S06AR-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NAF010-S06AR-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NAF010-S06ARN-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-NAR010-S06AR-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PVF010-S06AR-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PVF010-S06ARN-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-PVR010-S06AR-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PAF010-S06AR-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PAF010-S06ARN-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-PAR010-S06AR-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NVF010-S06C2-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NVF010-S06C2N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR010-S06C2-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NAF010-S06C2-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NAF010-S06C2N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR010-S06C2-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PVF010-S06C2-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PVF010-S06C2N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR010-S06C2-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PAF010-S06C2-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PAF010-S06C2N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR010-S06C2-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NVF010-S06C2-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NVF010-S06C2N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR010-S06C2-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NAF010-S06C2-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NAF010-S06C2N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR010-S06C2-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PVF010-S06C2-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PVF010-S06C2N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR010-S06C2-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PAF010-S06C2-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PAF010-S06C2N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR010-S06C2-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NVF020-H04-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF020-H04N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR020-H04-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF020-H04-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF020-H04N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR020-H04-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF020-H04-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF020-H04N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR020-H04-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF020-H04-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF020-H04N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR020-H04-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF020-H04-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF020-H04N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR020-H04-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF020-H04-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF020-H04N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR020-H04-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF020-H04-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF020-H04N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR020-H04-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF020-H04-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF020-H04N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR020-H04-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF020-H06-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF020-H06N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR020-H06-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF020-H06-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF020-H06N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR020-H06-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF020-H06-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF020-H06N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR020-H06-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF020-H06-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF020-H06N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR020-H06-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF020-H06-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF020-H06N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR020-H06-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF020-H06-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF020-H06N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR020-H06-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF020-H06-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF020-H06N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR020-H06-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF020-H06-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF020-H06N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR020-H06-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF020-S06-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF020-S06N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR020-S06-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF020-S06-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF020-S06N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR020-S06-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF020-S06-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF020-S06N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR020-S06-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF020-S06-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF020-S06N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR020-S06-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF020-S06-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF020-S06N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR020-S06-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF020-S06-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF020-S06N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR020-S06-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF020-S06-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF020-S06N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR020-S06-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF020-S06-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF020-S06N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR020-S06-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF020-S06AR-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NVF020-S06ARN-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR020-S06AR-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NAF020-S06AR-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NAF020-S06ARN-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR020-S06AR-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PVF020-S06AR-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PVF020-S06ARN-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR020-S06AR-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PAF020-S06AR-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PAF020-S06ARN-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR020-S06AR-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NVF020-S06AR-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NVF020-S06ARN-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-NVR020-S06AR-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NAF020-S06AR-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NAF020-S06ARN-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-NAR020-S06AR-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PVF020-S06AR-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PVF020-S06ARN-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-PVR020-S06AR-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PAF020-S06AR-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PAF020-S06ARN-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-PAR020-S06AR-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NVF020-S06C2-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NVF020-S06C2N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR020-S06C2-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NAF020-S06C2-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NAF020-S06C2N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR020-S06C2-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PVF020-S06C2-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PVF020-S06C2N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR020-S06C2-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PAF020-S06C2-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PAF020-S06C2N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR020-S06C2-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NVF020-S06C2-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NVF020-S06C2N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR020-S06C2-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NAF020-S06C2-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NAF020-S06C2N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR020-S06C2-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PVF020-S06C2-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PVF020-S06C2N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR020-S06C2-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PAF020-S06C2-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PAF020-S06C2N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR020-S06C2-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NVF050-H04-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF050-H04N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR050-H04-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF050-H04-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF050-H04N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR050-H04-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF050-H04-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF050-H04N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR050-H04-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF050-H04-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF050-H04N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR050-H04-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF050-H04-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF050-H04N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR050-H04-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF050-H04-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF050-H04N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR050-H04-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF050-H04-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF050-H04N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR050-H04-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF050-H04-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF050-H04N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR050-H04-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF050-H06-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF050-H06N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR050-H06-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF050-H06-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF050-H06N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR050-H06-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF050-H06-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF050-H06N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR050-H06-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF050-H06-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF050-H06N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR050-H06-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF050-H06-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF050-H06N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR050-H06-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF050-H06-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF050-H06N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR050-H06-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF050-H06-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF050-H06N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR050-H06-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF050-H06-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF050-H06N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR050-H06-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF050-S06-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF050-S06N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR050-S06-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF050-S06-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF050-S06N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR050-S06-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF050-S06-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF050-S06N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR050-S06-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF050-S06-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF050-S06N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR050-S06-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF050-S06-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF050-S06N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR050-S06-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF050-S06-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF050-S06N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR050-S06-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF050-S06-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF050-S06N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR050-S06-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF050-S06-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF050-S06N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR050-S06-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF050-S06AR-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NVF050-S06ARN-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR050-S06AR-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NAF050-S06AR-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NAF050-S06ARN-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR050-S06AR-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PVF050-S06AR-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PVF050-S06ARN-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR050-S06AR-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PAF050-S06AR-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PAF050-S06ARN-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR050-S06AR-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NVF050-S06AR-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NVF050-S06ARN-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-NVR050-S06AR-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NAF050-S06AR-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NAF050-S06ARN-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-NAR050-S06AR-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PVF050-S06AR-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PVF050-S06ARN-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-PVR050-S06AR-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PAF050-S06AR-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PAF050-S06ARN-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-PAR050-S06AR-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NVF050-S06C2-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NVF050-S06C2N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR050-S06C2-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NAF050-S06C2-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NAF050-S06C2N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR050-S06C2-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PVF050-S06C2-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PVF050-S06C2N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR050-S06C2-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PAF050-S06C2-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PAF050-S06C2N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR050-S06C2-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NVF050-S06C2-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NVF050-S06C2N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR050-S06C2-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NAF050-S06C2-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NAF050-S06C2N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR050-S06C2-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PVF050-S06C2-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PVF050-S06C2N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR050-S06C2-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PAF050-S06C2-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PAF050-S06C2N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR050-S06C2-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NVF100-H04-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF100-H04N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR100-H04-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF100-H04-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF100-H04N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR100-H04-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF100-H04-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF100-H04N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR100-H04-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF100-H04-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF100-H04N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR100-H04-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF100-H04-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF100-H04N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR100-H04-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF100-H04-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF100-H04N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR100-H04-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF100-H04-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF100-H04N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR100-H04-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF100-H04-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF100-H04N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR100-H04-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF100-H06-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF100-H06N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR100-H06-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF100-H06-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF100-H06N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR100-H06-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF100-H06-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF100-H06N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR100-H06-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF100-H06-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF100-H06N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR100-H06-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF100-H06-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF100-H06N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR100-H06-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF100-H06-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF100-H06N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR100-H06-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF100-H06-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF100-H06N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR100-H06-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF100-H06-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF100-H06N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR100-H06-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF100-S06-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF100-S06N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR100-S06-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF100-S06-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF100-S06N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR100-S06-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF100-S06-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF100-S06N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR100-S06-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF100-S06-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF100-S06N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR100-S06-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF100-S06-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF100-S06N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR100-S06-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF100-S06-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF100-S06N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR100-S06-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF100-S06-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF100-S06N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR100-S06-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF100-S06-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF100-S06N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR100-S06-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF100-S06AR-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NVF100-S06ARN-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR100-S06AR-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NAF100-S06AR-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NAF100-S06ARN-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR100-S06AR-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PVF100-S06AR-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PVF100-S06ARN-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR100-S06AR-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PAF100-S06AR-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PAF100-S06ARN-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR100-S06AR-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NVF100-S06AR-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NVF100-S06ARN-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-NVR100-S06AR-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NAF100-S06AR-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NAF100-S06ARN-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-NAR100-S06AR-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PVF100-S06AR-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PVF100-S06ARN-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-PVR100-S06AR-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PAF100-S06AR-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PAF100-S06ARN-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-PAR100-S06AR-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NVF100-S06C2-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NVF100-S06C2N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR100-S06C2-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NAF100-S06C2-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NAF100-S06C2N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR100-S06C2-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PVF100-S06C2-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PVF100-S06C2N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR100-S06C2-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PAF100-S06C2-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PAF100-S06C2N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR100-S06C2-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NVF100-S06C2-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NVF100-S06C2N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR100-S06C2-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NAF100-S06C2-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NAF100-S06C2N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR100-S06C2-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PVF100-S06C2-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PVF100-S06C2N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR100-S06C2-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PAF100-S06C2-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PAF100-S06C2N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR100-S06C2-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NVF200-H04-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF200-H04N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR200-H04-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF200-H04-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF200-H04N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR200-H04-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF200-H04-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF200-H04N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR200-H04-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF200-H04-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF200-H04N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR200-H04-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF200-H04-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF200-H04N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR200-H04-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF200-H04-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF200-H04N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR200-H04-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF200-H04-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF200-H04N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR200-H04-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF200-H04-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF200-H04N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR200-H04-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF200-H06-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF200-H06N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR200-H06-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF200-H06-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF200-H06N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR200-H06-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF200-H06-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF200-H06N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR200-H06-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF200-H06-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF200-H06N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR200-H06-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF200-H06-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF200-H06N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR200-H06-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF200-H06-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF200-H06N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR200-H06-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF200-H06-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF200-H06N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR200-H06-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF200-H06-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF200-H06N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR200-H06-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF200-S06-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF200-S06N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR200-S06-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF200-S06-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF200-S06N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR200-S06-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF200-S06-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF200-S06N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR200-S06-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF200-S06-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF200-S06N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR200-S06-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF200-S06-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF200-S06N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR200-S06-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF200-S06-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF200-S06N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR200-S06-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF200-S06-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF200-S06N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR200-S06-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF200-S06-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF200-S06N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR200-S06-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF200-S06AR-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NVF200-S06ARN-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR200-S06AR-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NAF200-S06AR-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NAF200-S06ARN-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR200-S06AR-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PVF200-S06AR-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PVF200-S06ARN-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR200-S06AR-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PAF200-S06AR-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PAF200-S06ARN-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR200-S06AR-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NVF200-S06AR-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NVF200-S06ARN-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-NVR200-S06AR-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NAF200-S06AR-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NAF200-S06ARN-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-NAR200-S06AR-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PVF200-S06AR-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PVF200-S06ARN-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-PVR200-S06AR-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PAF200-S06AR-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PAF200-S06ARN-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-PAR200-S06AR-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NVF200-S06C2-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NVF200-S06C2N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR200-S06C2-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NAF200-S06C2-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NAF200-S06C2N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR200-S06C2-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PVF200-S06C2-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PVF200-S06C2N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR200-S06C2-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PAF200-S06C2-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PAF200-S06C2N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR200-S06C2-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NVF200-S06C2-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NVF200-S06C2N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR200-S06C2-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NAF200-S06C2-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NAF200-S06C2N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR200-S06C2-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PVF200-S06C2-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PVF200-S06C2N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR200-S06C2-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PAF200-S06C2-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PAF200-S06C2N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR200-S06C2-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NVF500-H06-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF500-H06N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR500-H06-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF500-H06-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF500-H06N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR500-H06-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF500-H06-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF500-H06N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR500-H06-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF500-H06-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF500-H06N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR500-H06-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF500-H06-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF500-H06N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR500-H06-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF500-H06-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF500-H06N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR500-H06-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF500-H06-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF500-H06N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR500-H06-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF500-H06-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF500-H06N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR500-H06-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF500-H08-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF500-H08N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR500-H08-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF500-H08-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF500-H08N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR500-H08-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF500-H08-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF500-H08N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR500-H08-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF500-H08-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF500-H08N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR500-H08-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF500-S06-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF500-S06N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR500-S06-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF500-S06-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF500-S06N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR500-S06-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF500-S06-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF500-S06N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR500-S06-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF500-S06-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF500-S06N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR500-S06-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF500-S06-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF500-S06N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR500-S06-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF500-S06-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF500-S06N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR500-S06-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF500-S06-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF500-S06N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR500-S06-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF500-S06-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF500-S06N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR500-S06-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF500-S06AR-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NVF500-S06ARN-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR500-S06AR-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NAF500-S06AR-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NAF500-S06ARN-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR500-S06AR-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PVF500-S06AR-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PVF500-S06ARN-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR500-S06AR-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PAF500-S06AR-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PAF500-S06ARN-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR500-S06AR-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NVF500-S06AR-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NVF500-S06ARN-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-NVR500-S06AR-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NAF500-S06AR-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NAF500-S06ARN-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-NAR500-S06AR-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PVF500-S06AR-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PVF500-S06ARN-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-PVR500-S06AR-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PAF500-S06AR-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PAF500-S06ARN-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-PAR500-S06AR-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NVF500-S08-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF500-S08N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR500-S08-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF500-S08-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF500-S08N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR500-S08-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF500-S08-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF500-S08N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR500-S08-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF500-S08-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF500-S08N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR500-S08-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF500-S08-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF500-S08N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR500-S08-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF500-S08-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF500-S08N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR500-S08-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF500-S08-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF500-S08N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR500-S08-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF500-S08-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF500-S08N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR500-S08-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF500-S08AR-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NVF500-S08ARN-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR500-S08AR-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NAF500-S08AR-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NAF500-S08ARN-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR500-S08AR-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PVF500-S08AR-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PVF500-S08ARN-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR500-S08AR-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PAF500-S08AR-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PAF500-S08ARN-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR500-S08AR-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NVF500-S08AR-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NVF500-S08ARN-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-NVR500-S08AR-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NAF500-S08AR-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NAF500-S08ARN-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-NAR500-S08AR-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PVF500-S08AR-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PVF500-S08ARN-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-PVR500-S08AR-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PAF500-S08AR-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PAF500-S08ARN-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-PAR500-S08AR-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NVF500-S08C2-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NVF500-S08C2N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR500-S08C2-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NAF500-S08C2-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NAF500-S08C2N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR500-S08C2-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PVF500-S08C2-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PVF500-S08C2N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR500-S08C2-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PAF500-S08C2-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PAF500-S08C2N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR500-S08C2-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NVF500-S08C2-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NVF500-S08C2N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR500-S08C2-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NAF500-S08C2-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NAF500-S08C2N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR500-S08C2-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PVF500-S08C2-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PVF500-S08C2N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR500-S08C2-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PAF500-S08C2-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PAF500-S08C2N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR500-S08C2-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NVF101-H08-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF101-H08N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR101-H08-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF101-H08-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF101-H08N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR101-H08-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF101-H08-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF101-H08N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR101-H08-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF101-H08-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF101-H08N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR101-H08-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF101-H10-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF101-H10N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR101-H10-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF101-H10-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF101-H10N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR101-H10-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF101-H10-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF101-H10N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR101-H10-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF101-H10-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF101-H10N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR101-H10-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF101-S08-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF101-S08N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR101-S08-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF101-S08-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF101-S08N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR101-S08-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF101-S08-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF101-S08N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR101-S08-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF101-S08-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF101-S08N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR101-S08-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF101-S08-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF101-S08N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR101-S08-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF101-S08-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF101-S08N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR101-S08-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF101-S08-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF101-S08N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR101-S08-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF101-S08-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF101-S08N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR101-S08-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF101-S08AR-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NVF101-S08ARN-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR101-S08AR-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NAF101-S08AR-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NAF101-S08ARN-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR101-S08AR-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PVF101-S08AR-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PVF101-S08ARN-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR101-S08AR-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PAF101-S08AR-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-PAF101-S08ARN-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR101-S08AR-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
FSM2-NVF101-S08AR-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NVF101-S08ARN-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-NVR101-S08AR-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NAF101-S08AR-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NAF101-S08ARN-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-NAR101-S08AR-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PVF101-S08AR-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PVF101-S08ARN-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-PVR101-S08AR-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PAF101-S08AR-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-PAF101-S08ARN-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
FSM2-PAR101-S08AR-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
FSM2-NVF101-S08C2-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NVF101-S08C2N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR101-S08C2-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NAF101-S08C2-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NAF101-S08C2N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR101-S08C2-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PVF101-S08C2-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PVF101-S08C2N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR101-S08C2-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PAF101-S08C2-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-PAF101-S08C2N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR101-S08C2-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
FSM2-NVF101-S08C2-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NVF101-S08C2N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR101-S08C2-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NAF101-S08C2-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NAF101-S08C2N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR101-S08C2-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PVF101-S08C2-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PVF101-S08C2N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR101-S08C2-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PAF101-S08C2-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-PAF101-S08C2N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR101-S08C2-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
FSM2-NVF201-H08-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF201-H08N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR201-H08-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF201-H08-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF201-H08N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR201-H08-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF201-H08-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF201-H08N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR201-H08-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF201-H08-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF201-H08N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR201-H08-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF201-H10-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF201-H10N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR201-H10-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF201-H10-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF201-H10N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR201-H10-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF201-H10-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF201-H10N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR201-H10-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF201-H10-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF201-H10N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR201-H10-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF201-S08-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF201-S08N-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NVR201-S08-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF201-S08-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF201-S08N-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-NAR201-S08-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF201-S08-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF201-S08N-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PVR201-S08-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF201-S08-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF201-S08N-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
FSM2-PAR201-S08-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF201-S08-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF201-S08N-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NVR201-S08-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF201-S08-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF201-S08N-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-NAR201-S08-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF201-S08-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF201-S08N-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PVR201-S08-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF201-S08-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF201-S08N-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
FSM2-PAR201-S08-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF501-A15-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVR501-A15-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF501-A15-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAR501-A15-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF501-A15-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVR501-A15-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF501-A15-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAR501-A15-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF501-A15-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVR501-A15-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF501-A15-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAR501-A15-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF501-A15-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVR501-A15-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF501-A15-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAR501-A15-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVF102-A15-P70		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVR102-A15-P70		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAF102-A15-P70		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NAR102-A15-P70		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVF102-A15-P70		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PVR102-A15-P70		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAF102-A15-P70		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-PAR102-A15-P70		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
FSM2-NVF102-A15-P80		Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NVR102-A15-P80		Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAF102-A15-P80		Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-NAR102-A15-P80		Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVF102-A15-P80		Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PVR102-A15-P80		Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAF102-A15-P80		Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
FSM2-PAR102-A15-P80		Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free

Flow SensorsCKD

1052 product codes available in this family

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CKD FSM2 Rapiflow Flow Sensor, Display-Integrated (Clean P70/P80)

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Available part numbers (1052)

FSM2-NVF005-H04-P70, FSM2-NVF005-H04N-P70, FSM2-NVR005-H04-P70, FSM2-NAF005-H04-P70, FSM2-NAF005-H04N-P70, FSM2-NAR005-H04-P70, FSM2-PVF005-H04-P70, FSM2-PVF005-H04N-P70, FSM2-PVR005-H04-P70, FSM2-PAF005-H04-P70 + 1042 more — see full table ↓

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	Product code	Spec
	FSM2-NVF005-H04-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF005-H04N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR005-H04-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF005-H04-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF005-H04N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR005-H04-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF005-H04-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF005-H04N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR005-H04-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF005-H04-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF005-H04N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR005-H04-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF005-H04-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF005-H04N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR005-H04-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF005-H04-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF005-H04N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR005-H04-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF005-H04-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF005-H04N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR005-H04-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF005-H04-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF005-H04N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR005-H04-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF005-H06-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF005-H06N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR005-H06-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF005-H06-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF005-H06N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR005-H06-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF005-H06-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF005-H06N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR005-H06-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF005-H06-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF005-H06N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR005-H06-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF005-H06-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF005-H06N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR005-H06-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF005-H06-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF005-H06N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR005-H06-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF005-H06-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF005-H06N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR005-H06-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF005-H06-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF005-H06N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR005-H06-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF005-S06-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF005-S06N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR005-S06-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF005-S06-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF005-S06N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR005-S06-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF005-S06-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF005-S06N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR005-S06-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF005-S06-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF005-S06N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR005-S06-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF005-S06-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF005-S06N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR005-S06-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF005-S06-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF005-S06N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR005-S06-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF005-S06-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF005-S06N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR005-S06-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF005-S06-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF005-S06N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR005-S06-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF005-S06AR-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NVF005-S06ARN-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR005-S06AR-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NAF005-S06AR-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NAF005-S06ARN-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR005-S06AR-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PVF005-S06AR-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PVF005-S06ARN-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR005-S06AR-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PAF005-S06AR-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PAF005-S06ARN-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR005-S06AR-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NVF005-S06AR-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NVF005-S06ARN-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR005-S06AR-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NAF005-S06AR-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NAF005-S06ARN-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR005-S06AR-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PVF005-S06AR-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PVF005-S06ARN-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR005-S06AR-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PAF005-S06AR-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PAF005-S06ARN-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR005-S06AR-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NVF005-S06C2-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF005-S06C2N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR005-S06C2-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF005-S06C2-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF005-S06C2N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR005-S06C2-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF005-S06C2-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF005-S06C2N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR005-S06C2-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF005-S06C2-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF005-S06C2N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR005-S06C2-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF005-S06C2-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NVF005-S06C2N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR005-S06C2-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NAF005-S06C2-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NAF005-S06C2N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR005-S06C2-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PVF005-S06C2-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PVF005-S06C2N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR005-S06C2-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PAF005-S06C2-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PAF005-S06C2N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR005-S06C2-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 mL/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NVF010-H04-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF010-H04N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR010-H04-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF010-H04-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF010-H04N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR010-H04-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF010-H04-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF010-H04N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR010-H04-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF010-H04-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF010-H04N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR010-H04-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF010-H04-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF010-H04N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR010-H04-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF010-H04-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF010-H04N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR010-H04-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF010-H04-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF010-H04N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR010-H04-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF010-H04-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF010-H04N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR010-H04-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF010-H06-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF010-H06N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR010-H06-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF010-H06-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF010-H06N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR010-H06-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF010-H06-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF010-H06N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR010-H06-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF010-H06-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF010-H06N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR010-H06-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF010-H06-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF010-H06N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR010-H06-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF010-H06-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF010-H06N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR010-H06-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF010-H06-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF010-H06N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR010-H06-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF010-H06-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF010-H06N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR010-H06-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF010-S06-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF010-S06N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR010-S06-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF010-S06-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF010-S06N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR010-S06-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF010-S06-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF010-S06N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR010-S06-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF010-S06-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF010-S06N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR010-S06-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF010-S06-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF010-S06N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR010-S06-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF010-S06-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF010-S06N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR010-S06-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF010-S06-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF010-S06N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR010-S06-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF010-S06-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF010-S06N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR010-S06-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF010-S06AR-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NVF010-S06ARN-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR010-S06AR-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NAF010-S06AR-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NAF010-S06ARN-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR010-S06AR-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PVF010-S06AR-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PVF010-S06ARN-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR010-S06AR-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PAF010-S06AR-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PAF010-S06ARN-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR010-S06AR-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NVF010-S06AR-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NVF010-S06ARN-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR010-S06AR-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NAF010-S06AR-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NAF010-S06ARN-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR010-S06AR-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PVF010-S06AR-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PVF010-S06ARN-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR010-S06AR-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PAF010-S06AR-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PAF010-S06ARN-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR010-S06AR-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NVF010-S06C2-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF010-S06C2N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR010-S06C2-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF010-S06C2-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF010-S06C2N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR010-S06C2-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF010-S06C2-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF010-S06C2N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR010-S06C2-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF010-S06C2-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF010-S06C2N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR010-S06C2-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF010-S06C2-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NVF010-S06C2N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR010-S06C2-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NAF010-S06C2-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NAF010-S06C2N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR010-S06C2-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PVF010-S06C2-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PVF010-S06C2N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR010-S06C2-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PAF010-S06C2-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PAF010-S06C2N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR010-S06C2-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NVF020-H04-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF020-H04N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR020-H04-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF020-H04-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF020-H04N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR020-H04-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF020-H04-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF020-H04N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR020-H04-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF020-H04-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF020-H04N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR020-H04-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF020-H04-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF020-H04N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR020-H04-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF020-H04-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF020-H04N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR020-H04-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF020-H04-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF020-H04N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR020-H04-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF020-H04-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF020-H04N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR020-H04-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF020-H06-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF020-H06N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR020-H06-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF020-H06-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF020-H06N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR020-H06-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF020-H06-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF020-H06N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR020-H06-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF020-H06-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF020-H06N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR020-H06-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF020-H06-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF020-H06N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR020-H06-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF020-H06-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF020-H06N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR020-H06-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF020-H06-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF020-H06N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR020-H06-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF020-H06-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF020-H06N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR020-H06-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF020-S06-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF020-S06N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR020-S06-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF020-S06-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF020-S06N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR020-S06-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF020-S06-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF020-S06N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR020-S06-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF020-S06-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF020-S06N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR020-S06-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF020-S06-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF020-S06N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR020-S06-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF020-S06-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF020-S06N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR020-S06-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF020-S06-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF020-S06N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR020-S06-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF020-S06-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF020-S06N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR020-S06-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF020-S06AR-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NVF020-S06ARN-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR020-S06AR-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NAF020-S06AR-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NAF020-S06ARN-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR020-S06AR-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PVF020-S06AR-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PVF020-S06ARN-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR020-S06AR-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PAF020-S06AR-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PAF020-S06ARN-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR020-S06AR-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NVF020-S06AR-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NVF020-S06ARN-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR020-S06AR-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NAF020-S06AR-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NAF020-S06ARN-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR020-S06AR-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PVF020-S06AR-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PVF020-S06ARN-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR020-S06AR-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PAF020-S06AR-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PAF020-S06ARN-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR020-S06AR-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NVF020-S06C2-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF020-S06C2N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR020-S06C2-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF020-S06C2-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF020-S06C2N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR020-S06C2-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF020-S06C2-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF020-S06C2N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR020-S06C2-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF020-S06C2-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF020-S06C2N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR020-S06C2-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF020-S06C2-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NVF020-S06C2N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR020-S06C2-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NAF020-S06C2-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NAF020-S06C2N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR020-S06C2-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PVF020-S06C2-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PVF020-S06C2N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR020-S06C2-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PAF020-S06C2-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PAF020-S06C2N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR020-S06C2-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 2 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NVF050-H04-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF050-H04N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR050-H04-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF050-H04-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF050-H04N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR050-H04-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF050-H04-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF050-H04N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR050-H04-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF050-H04-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF050-H04N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR050-H04-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF050-H04-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF050-H04N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR050-H04-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF050-H04-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF050-H04N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR050-H04-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF050-H04-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF050-H04N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR050-H04-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF050-H04-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF050-H04N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR050-H04-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF050-H06-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF050-H06N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR050-H06-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF050-H06-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF050-H06N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR050-H06-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF050-H06-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF050-H06N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR050-H06-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF050-H06-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF050-H06N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR050-H06-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF050-H06-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF050-H06N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR050-H06-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF050-H06-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF050-H06N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR050-H06-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF050-H06-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF050-H06N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR050-H06-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF050-H06-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF050-H06N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR050-H06-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF050-S06-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF050-S06N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR050-S06-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF050-S06-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF050-S06N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR050-S06-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF050-S06-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF050-S06N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR050-S06-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF050-S06-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF050-S06N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR050-S06-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF050-S06-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF050-S06N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR050-S06-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF050-S06-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF050-S06N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR050-S06-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF050-S06-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF050-S06N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR050-S06-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF050-S06-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF050-S06N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR050-S06-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF050-S06AR-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NVF050-S06ARN-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR050-S06AR-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NAF050-S06AR-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NAF050-S06ARN-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR050-S06AR-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PVF050-S06AR-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PVF050-S06ARN-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR050-S06AR-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PAF050-S06AR-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PAF050-S06ARN-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR050-S06AR-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NVF050-S06AR-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NVF050-S06ARN-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR050-S06AR-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NAF050-S06AR-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NAF050-S06ARN-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR050-S06AR-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PVF050-S06AR-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PVF050-S06ARN-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR050-S06AR-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PAF050-S06AR-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PAF050-S06ARN-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR050-S06AR-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NVF050-S06C2-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF050-S06C2N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR050-S06C2-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF050-S06C2-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF050-S06C2N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR050-S06C2-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF050-S06C2-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF050-S06C2N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR050-S06C2-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF050-S06C2-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF050-S06C2N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR050-S06C2-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF050-S06C2-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NVF050-S06C2N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR050-S06C2-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NAF050-S06C2-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NAF050-S06C2N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR050-S06C2-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PVF050-S06C2-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PVF050-S06C2N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR050-S06C2-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PAF050-S06C2-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PAF050-S06C2N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR050-S06C2-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 5 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NVF100-H04-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF100-H04N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR100-H04-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF100-H04-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF100-H04N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR100-H04-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF100-H04-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF100-H04N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR100-H04-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF100-H04-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF100-H04N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR100-H04-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF100-H04-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF100-H04N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR100-H04-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF100-H04-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF100-H04N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR100-H04-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF100-H04-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF100-H04N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR100-H04-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF100-H04-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF100-H04N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR100-H04-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF100-H06-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF100-H06N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR100-H06-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF100-H06-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF100-H06N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR100-H06-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF100-H06-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF100-H06N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR100-H06-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF100-H06-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF100-H06N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR100-H06-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF100-H06-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF100-H06N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR100-H06-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF100-H06-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF100-H06N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR100-H06-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF100-H06-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF100-H06N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR100-H06-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF100-H06-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF100-H06N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR100-H06-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF100-S06-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF100-S06N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR100-S06-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF100-S06-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF100-S06N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR100-S06-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF100-S06-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF100-S06N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR100-S06-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF100-S06-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF100-S06N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR100-S06-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF100-S06-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF100-S06N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR100-S06-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF100-S06-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF100-S06N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR100-S06-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF100-S06-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF100-S06N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR100-S06-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF100-S06-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF100-S06N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR100-S06-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF100-S06AR-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NVF100-S06ARN-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR100-S06AR-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NAF100-S06AR-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NAF100-S06ARN-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR100-S06AR-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PVF100-S06AR-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PVF100-S06ARN-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR100-S06AR-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PAF100-S06AR-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PAF100-S06ARN-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR100-S06AR-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NVF100-S06AR-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NVF100-S06ARN-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR100-S06AR-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NAF100-S06AR-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NAF100-S06ARN-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR100-S06AR-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PVF100-S06AR-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PVF100-S06ARN-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR100-S06AR-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PAF100-S06AR-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PAF100-S06ARN-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR100-S06AR-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NVF100-S06C2-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF100-S06C2N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR100-S06C2-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF100-S06C2-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF100-S06C2N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR100-S06C2-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF100-S06C2-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF100-S06C2N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR100-S06C2-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF100-S06C2-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF100-S06C2N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR100-S06C2-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF100-S06C2-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NVF100-S06C2N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR100-S06C2-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NAF100-S06C2-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NAF100-S06C2N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR100-S06C2-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PVF100-S06C2-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PVF100-S06C2N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR100-S06C2-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PAF100-S06C2-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PAF100-S06C2N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR100-S06C2-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 10 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NVF200-H04-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF200-H04N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR200-H04-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF200-H04-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF200-H04N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR200-H04-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF200-H04-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF200-H04N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR200-H04-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF200-H04-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF200-H04N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR200-H04-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF200-H04-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF200-H04N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR200-H04-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF200-H04-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF200-H04N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR200-H04-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF200-H04-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF200-H04N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR200-H04-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF200-H04-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF200-H04N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR200-H04-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø4 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF200-H06-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF200-H06N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR200-H06-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF200-H06-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF200-H06N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR200-H06-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF200-H06-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF200-H06N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR200-H06-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF200-H06-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF200-H06N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR200-H06-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF200-H06-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF200-H06N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR200-H06-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF200-H06-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF200-H06N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR200-H06-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF200-H06-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF200-H06N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR200-H06-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF200-H06-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF200-H06N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR200-H06-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF200-S06-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF200-S06N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR200-S06-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF200-S06-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF200-S06N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR200-S06-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF200-S06-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF200-S06N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR200-S06-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF200-S06-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF200-S06N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR200-S06-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF200-S06-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF200-S06N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR200-S06-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF200-S06-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF200-S06N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR200-S06-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF200-S06-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF200-S06N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR200-S06-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF200-S06-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF200-S06N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR200-S06-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF200-S06AR-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NVF200-S06ARN-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR200-S06AR-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NAF200-S06AR-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NAF200-S06ARN-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR200-S06AR-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PVF200-S06AR-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PVF200-S06ARN-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR200-S06AR-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PAF200-S06AR-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PAF200-S06ARN-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR200-S06AR-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NVF200-S06AR-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NVF200-S06ARN-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR200-S06AR-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NAF200-S06AR-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NAF200-S06ARN-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR200-S06AR-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PVF200-S06AR-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PVF200-S06ARN-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR200-S06AR-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PAF200-S06AR-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PAF200-S06ARN-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR200-S06AR-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NVF200-S06C2-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF200-S06C2N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR200-S06C2-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF200-S06C2-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF200-S06C2N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR200-S06C2-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF200-S06C2-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF200-S06C2N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR200-S06C2-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF200-S06C2-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF200-S06C2N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR200-S06C2-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF200-S06C2-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NVF200-S06C2N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR200-S06C2-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NAF200-S06C2-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NAF200-S06C2N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR200-S06C2-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PVF200-S06C2-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PVF200-S06C2N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR200-S06C2-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PAF200-S06C2-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PAF200-S06C2N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR200-S06C2-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 20 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NVF500-H06-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF500-H06N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR500-H06-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF500-H06-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF500-H06N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR500-H06-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF500-H06-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF500-H06N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR500-H06-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF500-H06-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF500-H06N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR500-H06-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF500-H06-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF500-H06N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR500-H06-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF500-H06-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF500-H06N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR500-H06-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF500-H06-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF500-H06N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR500-H06-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF500-H06-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF500-H06N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR500-H06-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø6 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF500-H08-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF500-H08N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR500-H08-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF500-H08-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF500-H08N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR500-H08-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF500-H08-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF500-H08N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR500-H08-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF500-H08-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF500-H08N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR500-H08-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF500-S06-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF500-S06N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR500-S06-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF500-S06-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF500-S06N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR500-S06-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF500-S06-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF500-S06N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR500-S06-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF500-S06-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF500-S06N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR500-S06-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF500-S06-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF500-S06N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR500-S06-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF500-S06-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF500-S06N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR500-S06-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF500-S06-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF500-S06N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR500-S06-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF500-S06-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF500-S06N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR500-S06-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF500-S06AR-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NVF500-S06ARN-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR500-S06AR-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NAF500-S06AR-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NAF500-S06ARN-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR500-S06AR-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PVF500-S06AR-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PVF500-S06ARN-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR500-S06AR-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PAF500-S06AR-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PAF500-S06ARN-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR500-S06AR-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NVF500-S06AR-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NVF500-S06ARN-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR500-S06AR-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NAF500-S06AR-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NAF500-S06ARN-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR500-S06AR-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PVF500-S06AR-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PVF500-S06ARN-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR500-S06AR-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PAF500-S06AR-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PAF500-S06ARN-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR500-S06AR-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/8, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NVF500-S08-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF500-S08N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR500-S08-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF500-S08-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF500-S08N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR500-S08-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF500-S08-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF500-S08N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR500-S08-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF500-S08-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF500-S08N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR500-S08-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF500-S08-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF500-S08N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR500-S08-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF500-S08-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF500-S08N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR500-S08-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF500-S08-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF500-S08N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR500-S08-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF500-S08-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF500-S08N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR500-S08-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF500-S08AR-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NVF500-S08ARN-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR500-S08AR-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NAF500-S08AR-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NAF500-S08ARN-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR500-S08AR-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PVF500-S08AR-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PVF500-S08ARN-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR500-S08AR-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PAF500-S08AR-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PAF500-S08ARN-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR500-S08AR-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NVF500-S08AR-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NVF500-S08ARN-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR500-S08AR-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NAF500-S08AR-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NAF500-S08ARN-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR500-S08AR-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PVF500-S08AR-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PVF500-S08ARN-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR500-S08AR-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PAF500-S08AR-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PAF500-S08ARN-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR500-S08AR-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NVF500-S08C2-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF500-S08C2N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR500-S08C2-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF500-S08C2-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF500-S08C2N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR500-S08C2-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF500-S08C2-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF500-S08C2N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR500-S08C2-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF500-S08C2-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF500-S08C2N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR500-S08C2-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF500-S08C2-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NVF500-S08C2N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR500-S08C2-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NAF500-S08C2-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NAF500-S08C2N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR500-S08C2-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PVF500-S08C2-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PVF500-S08C2N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR500-S08C2-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PAF500-S08C2-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PAF500-S08C2N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR500-S08C2-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 50 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NVF101-H08-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF101-H08N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR101-H08-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF101-H08-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF101-H08N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR101-H08-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF101-H08-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF101-H08N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR101-H08-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF101-H08-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF101-H08N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR101-H08-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF101-H10-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF101-H10N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR101-H10-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF101-H10-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF101-H10N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR101-H10-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF101-H10-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF101-H10N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR101-H10-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF101-H10-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF101-H10N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR101-H10-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF101-S08-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF101-S08N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR101-S08-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF101-S08-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF101-S08N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR101-S08-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF101-S08-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF101-S08N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR101-S08-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF101-S08-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF101-S08N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR101-S08-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF101-S08-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF101-S08N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR101-S08-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF101-S08-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF101-S08N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR101-S08-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF101-S08-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF101-S08N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR101-S08-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF101-S08-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF101-S08N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR101-S08-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF101-S08AR-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NVF101-S08ARN-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR101-S08AR-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NAF101-S08AR-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NAF101-S08ARN-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR101-S08AR-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PVF101-S08AR-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PVF101-S08ARN-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR101-S08AR-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PAF101-S08AR-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-PAF101-S08ARN-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR101-S08AR-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P70 dust-generation proof
	FSM2-NVF101-S08AR-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NVF101-S08ARN-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR101-S08AR-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NAF101-S08AR-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NAF101-S08ARN-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR101-S08AR-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PVF101-S08AR-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PVF101-S08ARN-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR101-S08AR-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PAF101-S08AR-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-PAF101-S08ARN-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR101-S08AR-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Argon \| Clean spec: P80 oil-free
	FSM2-NVF101-S08C2-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF101-S08C2N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR101-S08C2-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF101-S08C2-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF101-S08C2N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR101-S08C2-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF101-S08C2-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF101-S08C2N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR101-S08C2-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF101-S08C2-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF101-S08C2N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR101-S08C2-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF101-S08C2-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NVF101-S08C2N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR101-S08C2-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NAF101-S08C2-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NAF101-S08C2N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR101-S08C2-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PVF101-S08C2-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PVF101-S08C2N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR101-S08C2-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PAF101-S08C2-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-PAF101-S08C2N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR101-S08C2-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 100 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: CO2 \| Clean spec: P80 oil-free
	FSM2-NVF201-H08-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF201-H08N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR201-H08-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF201-H08-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF201-H08N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR201-H08-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF201-H08-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF201-H08N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR201-H08-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF201-H08-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF201-H08N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR201-H08-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: ø8 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF201-H10-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF201-H10N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR201-H10-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF201-H10-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF201-H10N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR201-H10-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF201-H10-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF201-H10N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR201-H10-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF201-H10-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF201-H10N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR201-H10-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: ø10 push-in, resin \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF201-S08-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF201-S08N-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NVR201-S08-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF201-S08-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF201-S08N-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-NAR201-S08-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF201-S08-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF201-S08N-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PVR201-S08-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF201-S08-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF201-S08N-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P70 dust-generation proof
	FSM2-PAR201-S08-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF201-S08-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF201-S08N-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NVR201-S08-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF201-S08-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF201-S08N-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-NAR201-S08-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF201-S08-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF201-S08N-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PVR201-S08-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF201-S08-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF201-S08N-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 + needle valve \| Clean spec: P80 oil-free
	FSM2-PAR201-S08-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 200 L/min \| Port / body: Rc1/4, stainless \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF501-A15-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVR501-A15-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF501-A15-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAR501-A15-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF501-A15-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVR501-A15-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF501-A15-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAR501-A15-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF501-A15-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVR501-A15-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF501-A15-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAR501-A15-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF501-A15-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVR501-A15-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF501-A15-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAR501-A15-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 500 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVF102-A15-P70	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVR102-A15-P70	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAF102-A15-P70	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NAR102-A15-P70	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVF102-A15-P70	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PVR102-A15-P70	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAF102-A15-P70	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-PAR102-A15-P70	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P70 dust-generation proof
	FSM2-NVF102-A15-P80	Output: NPN x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NVR102-A15-P80	Output: NPN x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAF102-A15-P80	Output: NPN x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-NAR102-A15-P80	Output: NPN x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVF102-A15-P80	Output: PNP x2 + 1-5 V \| Direction: Unidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PVR102-A15-P80	Output: PNP x2 + 1-5 V \| Direction: Bidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAF102-A15-P80	Output: PNP x2 + 4-20 mA \| Direction: Unidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free
	FSM2-PAR102-A15-P80	Output: PNP x2 + 4-20 mA \| Direction: Bidirectional \| Flow range: 1000 L/min \| Port / body: Rc1/2, aluminium \| Gas / needle: Air/N2 \| Clean spec: P80 oil-free

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CKD FSM2 Rapiflow Flow Sensor, Display-Integrated (Clean P70/P80)