
Product codes & specifications
| Product code | Spec | ||
|---|---|---|---|
| FSM2-AVF005-H04-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 500 mL/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR005-H04-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 500 mL/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF005-H04-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 500 mL/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR005-H04-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 500 mL/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF005-H04-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 500 mL/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR005-H04-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 500 mL/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF005-H04-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 500 mL/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR005-H04-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 500 mL/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF005-H06-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 500 mL/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR005-H06-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 500 mL/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF005-H06-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 500 mL/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR005-H06-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 500 mL/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF005-H06-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 500 mL/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR005-H06-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 500 mL/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF005-H06-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 500 mL/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR005-H06-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 500 mL/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF005-S06-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR005-S06-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF005-S06-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR005-S06-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF005-S06-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR005-S06-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF005-S06-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR005-S06-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF005-S06AR-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR005-S06AR-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF005-S06AR-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR005-S06AR-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF005-S06AR-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AVR005-S06AR-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AAF005-S06AR-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AAR005-S06AR-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AVF005-S06C2-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR005-S06C2-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF005-S06C2-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR005-S06C2-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF005-S06C2-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AVR005-S06C2-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AAF005-S06C2-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AAR005-S06C2-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 500 mL/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AVF010-H04-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 1 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR010-H04-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 1 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF010-H04-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 1 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR010-H04-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 1 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF010-H04-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 1 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR010-H04-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 1 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF010-H04-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 1 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR010-H04-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 1 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF010-H06-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 1 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR010-H06-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 1 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF010-H06-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 1 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR010-H06-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 1 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF010-H06-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 1 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR010-H06-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 1 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF010-H06-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 1 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR010-H06-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 1 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF010-S06-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR010-S06-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF010-S06-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR010-S06-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF010-S06-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR010-S06-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF010-S06-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR010-S06-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF010-S06AR-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR010-S06AR-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF010-S06AR-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR010-S06AR-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF010-S06AR-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AVR010-S06AR-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AAF010-S06AR-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AAR010-S06AR-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AVF010-S06C2-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR010-S06C2-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF010-S06C2-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR010-S06C2-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF010-S06C2-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AVR010-S06C2-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AAF010-S06C2-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AAR010-S06C2-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 1 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AVF020-H04-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 2 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR020-H04-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 2 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF020-H04-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 2 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR020-H04-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 2 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF020-H04-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 2 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR020-H04-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 2 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF020-H04-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 2 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR020-H04-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 2 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF020-H06-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 2 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR020-H06-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 2 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF020-H06-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 2 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR020-H06-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 2 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF020-H06-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 2 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR020-H06-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 2 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF020-H06-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 2 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR020-H06-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 2 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF020-S06-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR020-S06-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF020-S06-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR020-S06-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF020-S06-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR020-S06-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF020-S06-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR020-S06-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF020-S06AR-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR020-S06AR-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF020-S06AR-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR020-S06AR-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF020-S06AR-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AVR020-S06AR-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AAF020-S06AR-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AAR020-S06AR-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AVF020-S06C2-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR020-S06C2-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF020-S06C2-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR020-S06C2-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF020-S06C2-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AVR020-S06C2-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AAF020-S06C2-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AAR020-S06C2-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 2 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AVF050-H04-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 5 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR050-H04-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 5 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF050-H04-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 5 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR050-H04-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 5 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF050-H04-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 5 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR050-H04-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 5 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF050-H04-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 5 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR050-H04-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 5 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF050-H06-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 5 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR050-H06-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 5 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF050-H06-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 5 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR050-H06-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 5 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF050-H06-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 5 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR050-H06-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 5 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF050-H06-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 5 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR050-H06-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 5 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF050-S06-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR050-S06-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF050-S06-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR050-S06-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF050-S06-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR050-S06-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF050-S06-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR050-S06-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF050-S06AR-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR050-S06AR-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF050-S06AR-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR050-S06AR-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF050-S06AR-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AVR050-S06AR-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AAF050-S06AR-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AAR050-S06AR-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AVF050-S06C2-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR050-S06C2-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF050-S06C2-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR050-S06C2-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF050-S06C2-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AVR050-S06C2-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AAF050-S06C2-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AAR050-S06C2-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 5 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AVF100-H04-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 10 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR100-H04-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 10 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF100-H04-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 10 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR100-H04-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 10 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF100-H04-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 10 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR100-H04-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 10 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF100-H04-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 10 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR100-H04-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 10 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF100-H06-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 10 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR100-H06-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 10 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF100-H06-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 10 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR100-H06-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 10 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF100-H06-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 10 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR100-H06-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 10 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF100-H06-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 10 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR100-H06-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 10 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF100-S06-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR100-S06-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF100-S06-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR100-S06-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF100-S06-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR100-S06-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF100-S06-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR100-S06-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF100-S06AR-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR100-S06AR-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF100-S06AR-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR100-S06AR-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF100-S06AR-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AVR100-S06AR-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AAF100-S06AR-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AAR100-S06AR-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AVF100-S06C2-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR100-S06C2-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF100-S06C2-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR100-S06C2-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF100-S06C2-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AVR100-S06C2-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AAF100-S06C2-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AAR100-S06C2-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 10 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AVF200-H04-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 20 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR200-H04-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 20 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF200-H04-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 20 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR200-H04-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 20 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF200-H04-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 20 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR200-H04-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 20 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF200-H04-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 20 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR200-H04-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 20 L/min | Port / body: ø4 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF200-H06-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 20 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR200-H06-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 20 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF200-H06-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 20 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR200-H06-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 20 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF200-H06-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 20 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR200-H06-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 20 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF200-H06-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 20 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR200-H06-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 20 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF200-S06-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR200-S06-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF200-S06-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR200-S06-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF200-S06-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR200-S06-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF200-S06-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR200-S06-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF200-S06AR-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR200-S06AR-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF200-S06AR-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR200-S06AR-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF200-S06AR-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AVR200-S06AR-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AAF200-S06AR-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AAR200-S06AR-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AVF200-S06C2-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR200-S06C2-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF200-S06C2-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR200-S06C2-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF200-S06C2-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AVR200-S06C2-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AAF200-S06C2-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AAR200-S06C2-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 20 L/min | Port / body: Rc1/8, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AVF500-H06-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 50 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR500-H06-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 50 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF500-H06-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 50 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR500-H06-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 50 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF500-H06-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 50 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR500-H06-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 50 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF500-H06-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 50 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR500-H06-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 50 L/min | Port / body: ø6 push-in, resin | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF500-H08-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 50 L/min | Port / body: ø8 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR500-H08-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 50 L/min | Port / body: ø8 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF500-H08-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 50 L/min | Port / body: ø8 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR500-H08-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 50 L/min | Port / body: ø8 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF500-S06-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 50 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR500-S06-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 50 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF500-S06-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 50 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR500-S06-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 50 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF500-S06-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 50 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR500-S06-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 50 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF500-S06-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 50 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR500-S06-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 50 L/min | Port / body: Rc1/8, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF500-S06AR-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 50 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR500-S06AR-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 50 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF500-S06AR-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 50 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR500-S06AR-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 50 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF500-S06AR-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 50 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AVR500-S06AR-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 50 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AAF500-S06AR-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 50 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AAR500-S06AR-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 50 L/min | Port / body: Rc1/8, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AVF500-S08-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR500-S08-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF500-S08-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR500-S08-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF500-S08-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR500-S08-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF500-S08-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR500-S08-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF500-S08AR-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR500-S08AR-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF500-S08AR-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR500-S08AR-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF500-S08AR-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AVR500-S08AR-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AAF500-S08AR-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AAR500-S08AR-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AVF500-S08C2-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR500-S08C2-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF500-S08C2-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR500-S08C2-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF500-S08C2-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AVR500-S08C2-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AAF500-S08C2-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AAR500-S08C2-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 50 L/min | Port / body: Rc1/4, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AVF101-H08-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 100 L/min | Port / body: ø8 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR101-H08-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 100 L/min | Port / body: ø8 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF101-H08-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 100 L/min | Port / body: ø8 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR101-H08-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 100 L/min | Port / body: ø8 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF101-H10-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 100 L/min | Port / body: ø10 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR101-H10-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 100 L/min | Port / body: ø10 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF101-H10-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 100 L/min | Port / body: ø10 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR101-H10-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 100 L/min | Port / body: ø10 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF101-S08-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR101-S08-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF101-S08-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR101-S08-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF101-S08-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR101-S08-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF101-S08-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR101-S08-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF101-S08AR-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR101-S08AR-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF101-S08AR-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR101-S08AR-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: Argon | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF101-S08AR-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AVR101-S08AR-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AAF101-S08AR-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AAR101-S08AR-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: Argon | Clean spec: P80 oil-free | ||
| FSM2-AVF101-S08C2-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR101-S08C2-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF101-S08C2-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR101-S08C2-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: CO2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF101-S08C2-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AVR101-S08C2-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AAF101-S08C2-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AAR101-S08C2-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 100 L/min | Port / body: Rc1/4, stainless | Gas: CO2 | Clean spec: P80 oil-free | ||
| FSM2-AVF201-H08-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 200 L/min | Port / body: ø8 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR201-H08-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 200 L/min | Port / body: ø8 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF201-H08-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 200 L/min | Port / body: ø8 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR201-H08-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 200 L/min | Port / body: ø8 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF201-H10-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 200 L/min | Port / body: ø10 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR201-H10-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 200 L/min | Port / body: ø10 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF201-H10-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 200 L/min | Port / body: ø10 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR201-H10-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 200 L/min | Port / body: ø10 push-in, resin | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF201-S08-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 200 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR201-S08-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 200 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF201-S08-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 200 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR201-S08-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 200 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF201-S08-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 200 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR201-S08-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 200 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF201-S08-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 200 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR201-S08-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 200 L/min | Port / body: Rc1/4, stainless | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF501-A15-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 500 L/min | Port / body: Rc1/2, aluminium | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR501-A15-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 500 L/min | Port / body: Rc1/2, aluminium | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF501-A15-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 500 L/min | Port / body: Rc1/2, aluminium | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR501-A15-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 500 L/min | Port / body: Rc1/2, aluminium | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF501-A15-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 500 L/min | Port / body: Rc1/2, aluminium | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR501-A15-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 500 L/min | Port / body: Rc1/2, aluminium | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF501-A15-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 500 L/min | Port / body: Rc1/2, aluminium | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR501-A15-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 500 L/min | Port / body: Rc1/2, aluminium | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVF102-A15-P70 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 1000 L/min | Port / body: Rc1/2, aluminium | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVR102-A15-P70 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 1000 L/min | Port / body: Rc1/2, aluminium | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAF102-A15-P70 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 1000 L/min | Port / body: Rc1/2, aluminium | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AAR102-A15-P70 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 1000 L/min | Port / body: Rc1/2, aluminium | Gas: Air/N2 | Clean spec: P70 dust-generation proof | ||
| FSM2-AVF102-A15-P80 | Analog output: 1-5 V | Direction: Unidirectional | Flow range: 1000 L/min | Port / body: Rc1/2, aluminium | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AVR102-A15-P80 | Analog output: 1-5 V | Direction: Bidirectional | Flow range: 1000 L/min | Port / body: Rc1/2, aluminium | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAF102-A15-P80 | Analog output: 4-20 mA | Direction: Unidirectional | Flow range: 1000 L/min | Port / body: Rc1/2, aluminium | Gas: Air/N2 | Clean spec: P80 oil-free | ||
| FSM2-AAR102-A15-P80 | Analog output: 4-20 mA | Direction: Bidirectional | Flow range: 1000 L/min | Port / body: Rc1/2, aluminium | Gas: Air/N2 | Clean spec: P80 oil-free |
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