CKD FSM3 Rapiflow Flow Sensor (LCD, Stainless Body, 1-5V Output)

CKD FSM3 Rapiflow compact thermal flow sensor (LCD, Stainless Body, 1-5V Output) for gases, with full-scale flow ranges from 500 mL/min to 1000 L/min.

Key features

Thermal MEMS flow sensor (platinum sensor chip on silicon) for clean air, compressed air and nitrogen
Full-scale flow ranges from 500 mL/min to 1000 L/min, unidirectional or bidirectional measurement
Stainless steel body with Rc, G, NPT, 1/4 in bite or JXR fittings; oxygen (oil-free) body 3 up to 200 L/min
4+4 digit 2-colour LCD with switch outputs, analog output, flow integration, peak hold and gas type switching
Needle valve (T) option on stainless LCD types; unit switching (unit 2) for export only
Order code shown with unit 1 (SI units) and valve option N; lead wire, bracket/panel/DIN rail mounting, inspection certificate (R, S) and clean specs P70/P80 are added as suffixes, e.g. -BMR-P80

Specifications

Display	4+4 digit 2-colour LCD
Applicable fluid	Clean dry air, compressed air, nitrogen, oxygen (body 3)
Operating pressure	-0.09 to 1.00 MPa (to 200 L/min), -0.09 to 0.75 MPa (500/1000 L/min)
Proof pressure	1.5 MPa
Accuracy	+/-3% F.S. (repeatability +/-1% F.S.)
Switch output	NPN or PNP open collector, 50 mA max.
Response time	50 ms or less
Power supply	12-24 VDC (1-5V types); 24 VDC (4-20mA types)
Fluid / ambient temperature	0 to 50 C, 90% RH or less
Protection	IP40 equivalent (IEC)
Source	CKD Korea catalog CB-024SK-9, p. 1466-1472

FSM3-L005U2AA1A1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005U2AA1B1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L005U2AA1C1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005U2AA1D1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L005U2AF1A1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005U2AF1B1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L005U2AF1C1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005U2AF1D1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L005U2AB1A1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005U2AB1B1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L005U2AB1C1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005U2AB1D1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L005U2AC1A1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005U2AC1B1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L005U2AC1C1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005U2AC1D1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L005U2AD1A1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005U2AD1B1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L005U2AD1C1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005U2AD1D1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L005U2AE1A1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005U2AE1B1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L005U2AE1C1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005U2AE1D1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L005U3AA1A1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005U3AA1B1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L005U3AA1C1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005U3AA1D1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L005U3AF1A1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005U3AF1B1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L005U3AF1C1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005U3AF1D1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L005U3AB1A1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005U3AB1B1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L005U3AB1C1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005U3AB1D1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L005U3AC1A1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005U3AC1B1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L005U3AC1C1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005U3AC1D1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L005U3AD1A1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005U3AD1B1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L005U3AD1C1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005U3AD1D1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L005U3AE1A1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005U3AE1B1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L005U3AE1C1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005U3AE1D1N		Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L005B2AA1A1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005B2AA1B1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L005B2AA1C1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005B2AA1D1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L005B2AF1A1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005B2AF1B1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L005B2AF1C1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005B2AF1D1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L005B2AB1A1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005B2AB1B1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L005B2AB1C1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005B2AB1D1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L005B2AC1A1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005B2AC1B1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L005B2AC1C1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005B2AC1D1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L005B2AD1A1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005B2AD1B1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L005B2AD1C1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005B2AD1D1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L005B2AE1A1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005B2AE1B1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L005B2AE1C1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005B2AE1D1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L005B3AA1A1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005B3AA1B1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L005B3AA1C1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005B3AA1D1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L005B3AF1A1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005B3AF1B1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L005B3AF1C1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005B3AF1D1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L005B3AB1A1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005B3AB1B1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L005B3AB1C1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005B3AB1D1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L005B3AC1A1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005B3AC1B1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L005B3AC1C1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005B3AC1D1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L005B3AD1A1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005B3AD1B1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L005B3AD1C1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005B3AD1D1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L005B3AE1A1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L005B3AE1B1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L005B3AE1C1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L005B3AE1D1N		Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L010U2AA1A1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010U2AA1B1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L010U2AA1C1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010U2AA1D1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L010U2AF1A1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010U2AF1B1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L010U2AF1C1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010U2AF1D1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L010U2AB1A1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010U2AB1B1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L010U2AB1C1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010U2AB1D1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L010U2AC1A1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010U2AC1B1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L010U2AC1C1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010U2AC1D1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L010U2AD1A1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010U2AD1B1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L010U2AD1C1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010U2AD1D1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L010U2AE1A1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010U2AE1B1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L010U2AE1C1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010U2AE1D1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L010U3AA1A1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010U3AA1B1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L010U3AA1C1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010U3AA1D1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L010U3AF1A1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010U3AF1B1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L010U3AF1C1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010U3AF1D1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L010U3AB1A1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010U3AB1B1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L010U3AB1C1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010U3AB1D1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L010U3AC1A1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010U3AC1B1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L010U3AC1C1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010U3AC1D1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L010U3AD1A1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010U3AD1B1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L010U3AD1C1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010U3AD1D1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L010U3AE1A1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010U3AE1B1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L010U3AE1C1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010U3AE1D1N		Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L010B2AA1A1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010B2AA1B1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L010B2AA1C1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010B2AA1D1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L010B2AF1A1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010B2AF1B1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L010B2AF1C1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010B2AF1D1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L010B2AB1A1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010B2AB1B1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L010B2AB1C1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010B2AB1D1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L010B2AC1A1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010B2AC1B1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L010B2AC1C1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010B2AC1D1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L010B2AD1A1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010B2AD1B1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L010B2AD1C1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010B2AD1D1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L010B2AE1A1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010B2AE1B1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L010B2AE1C1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010B2AE1D1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L010B3AA1A1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010B3AA1B1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L010B3AA1C1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010B3AA1D1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L010B3AF1A1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010B3AF1B1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L010B3AF1C1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010B3AF1D1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L010B3AB1A1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010B3AB1B1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L010B3AB1C1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010B3AB1D1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L010B3AC1A1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010B3AC1B1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L010B3AC1C1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010B3AC1D1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L010B3AD1A1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010B3AD1B1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L010B3AD1C1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010B3AD1D1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L010B3AE1A1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L010B3AE1B1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L010B3AE1C1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L010B3AE1D1N		Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L020U2AA1A1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020U2AA1B1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L020U2AA1C1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020U2AA1D1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L020U2AF1A1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020U2AF1B1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L020U2AF1C1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020U2AF1D1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L020U2AB1A1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020U2AB1B1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L020U2AB1C1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020U2AB1D1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L020U2AC1A1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020U2AC1B1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L020U2AC1C1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020U2AC1D1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L020U2AD1A1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020U2AD1B1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L020U2AD1C1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020U2AD1D1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L020U2AE1A1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020U2AE1B1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L020U2AE1C1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020U2AE1D1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L020U3AA1A1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020U3AA1B1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L020U3AA1C1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020U3AA1D1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L020U3AF1A1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020U3AF1B1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L020U3AF1C1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020U3AF1D1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L020U3AB1A1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020U3AB1B1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L020U3AB1C1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020U3AB1D1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L020U3AC1A1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020U3AC1B1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L020U3AC1C1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020U3AC1D1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L020U3AD1A1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020U3AD1B1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L020U3AD1C1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020U3AD1D1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L020U3AE1A1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020U3AE1B1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L020U3AE1C1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020U3AE1D1N		Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L020B2AA1A1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020B2AA1B1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L020B2AA1C1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020B2AA1D1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L020B2AF1A1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020B2AF1B1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L020B2AF1C1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020B2AF1D1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L020B2AB1A1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020B2AB1B1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L020B2AB1C1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020B2AB1D1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L020B2AC1A1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020B2AC1B1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L020B2AC1C1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020B2AC1D1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L020B2AD1A1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020B2AD1B1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L020B2AD1C1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020B2AD1D1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L020B2AE1A1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020B2AE1B1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L020B2AE1C1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020B2AE1D1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L020B3AA1A1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020B3AA1B1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L020B3AA1C1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020B3AA1D1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L020B3AF1A1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020B3AF1B1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L020B3AF1C1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020B3AF1D1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L020B3AB1A1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020B3AB1B1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L020B3AB1C1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020B3AB1D1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L020B3AC1A1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020B3AC1B1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L020B3AC1C1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020B3AC1D1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L020B3AD1A1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020B3AD1B1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L020B3AD1C1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020B3AD1D1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L020B3AE1A1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L020B3AE1B1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L020B3AE1C1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L020B3AE1D1N		Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L050U2AA1A1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050U2AA1B1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L050U2AA1C1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050U2AA1D1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L050U2AF1A1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050U2AF1B1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L050U2AF1C1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050U2AF1D1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L050U2AB1A1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050U2AB1B1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L050U2AB1C1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050U2AB1D1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L050U2AC1A1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050U2AC1B1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L050U2AC1C1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050U2AC1D1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L050U2AD1A1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050U2AD1B1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L050U2AD1C1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050U2AD1D1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L050U2AE1A1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050U2AE1B1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L050U2AE1C1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050U2AE1D1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L050U3AA1A1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050U3AA1B1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L050U3AA1C1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050U3AA1D1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L050U3AF1A1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050U3AF1B1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L050U3AF1C1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050U3AF1D1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L050U3AB1A1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050U3AB1B1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L050U3AB1C1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050U3AB1D1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L050U3AC1A1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050U3AC1B1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L050U3AC1C1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050U3AC1D1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L050U3AD1A1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050U3AD1B1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L050U3AD1C1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050U3AD1D1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L050U3AE1A1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050U3AE1B1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L050U3AE1C1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050U3AE1D1N		Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L050B2AA1A1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050B2AA1B1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L050B2AA1C1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050B2AA1D1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L050B2AF1A1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050B2AF1B1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L050B2AF1C1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050B2AF1D1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L050B2AB1A1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050B2AB1B1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L050B2AB1C1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050B2AB1D1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L050B2AC1A1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050B2AC1B1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L050B2AC1C1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050B2AC1D1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L050B2AD1A1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050B2AD1B1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L050B2AD1C1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050B2AD1D1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L050B2AE1A1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050B2AE1B1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L050B2AE1C1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050B2AE1D1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L050B3AA1A1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050B3AA1B1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L050B3AA1C1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050B3AA1D1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L050B3AF1A1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050B3AF1B1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L050B3AF1C1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050B3AF1D1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L050B3AB1A1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050B3AB1B1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L050B3AB1C1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050B3AB1D1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L050B3AC1A1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050B3AC1B1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L050B3AC1C1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050B3AC1D1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L050B3AD1A1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050B3AD1B1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L050B3AD1C1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050B3AD1D1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L050B3AE1A1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L050B3AE1B1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L050B3AE1C1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L050B3AE1D1N		Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L100U2AA1A1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100U2AA1B1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L100U2AA1C1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100U2AA1D1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L100U2AF1A1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100U2AF1B1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L100U2AF1C1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100U2AF1D1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L100U2AB1A1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100U2AB1B1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L100U2AB1C1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100U2AB1D1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L100U2AC1A1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100U2AC1B1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L100U2AC1C1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100U2AC1D1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L100U2AD1A1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100U2AD1B1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L100U2AD1C1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100U2AD1D1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L100U2AE1A1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100U2AE1B1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L100U2AE1C1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100U2AE1D1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L100U3AA1A1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100U3AA1B1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L100U3AA1C1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100U3AA1D1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L100U3AF1A1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100U3AF1B1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L100U3AF1C1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100U3AF1D1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L100U3AB1A1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100U3AB1B1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L100U3AB1C1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100U3AB1D1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L100U3AC1A1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100U3AC1B1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L100U3AC1C1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100U3AC1D1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L100U3AD1A1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100U3AD1B1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L100U3AD1C1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100U3AD1D1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L100U3AE1A1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100U3AE1B1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L100U3AE1C1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100U3AE1D1N		Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L100B2AA1A1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100B2AA1B1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L100B2AA1C1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100B2AA1D1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L100B2AF1A1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100B2AF1B1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L100B2AF1C1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100B2AF1D1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L100B2AB1A1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100B2AB1B1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L100B2AB1C1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100B2AB1D1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L100B2AC1A1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100B2AC1B1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L100B2AC1C1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100B2AC1D1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L100B2AD1A1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100B2AD1B1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L100B2AD1C1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100B2AD1D1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L100B2AE1A1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100B2AE1B1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L100B2AE1C1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100B2AE1D1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L100B3AA1A1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100B3AA1B1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L100B3AA1C1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100B3AA1D1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L100B3AF1A1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100B3AF1B1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L100B3AF1C1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100B3AF1D1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L100B3AB1A1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100B3AB1B1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L100B3AB1C1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100B3AB1D1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L100B3AC1A1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100B3AC1B1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L100B3AC1C1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100B3AC1D1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L100B3AD1A1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100B3AD1B1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L100B3AD1C1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100B3AD1D1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L100B3AE1A1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L100B3AE1B1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L100B3AE1C1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L100B3AE1D1N		Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L200U2AA1A1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200U2AA1B1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L200U2AA1C1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200U2AA1D1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L200U2AF1A1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200U2AF1B1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L200U2AF1C1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200U2AF1D1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L200U2AB1A1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200U2AB1B1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L200U2AB1C1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200U2AB1D1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L200U2AC1A1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200U2AC1B1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L200U2AC1C1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200U2AC1D1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L200U2AD1A1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200U2AD1B1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L200U2AD1C1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200U2AD1D1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L200U2AE1A1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200U2AE1B1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L200U2AE1C1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200U2AE1D1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L200U3AA1A1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200U3AA1B1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L200U3AA1C1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200U3AA1D1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L200U3AF1A1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200U3AF1B1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L200U3AF1C1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200U3AF1D1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L200U3AB1A1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200U3AB1B1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L200U3AB1C1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200U3AB1D1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L200U3AC1A1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200U3AC1B1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L200U3AC1C1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200U3AC1D1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L200U3AD1A1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200U3AD1B1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L200U3AD1C1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200U3AD1D1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L200U3AE1A1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200U3AE1B1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L200U3AE1C1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200U3AE1D1N		Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L200B2AA1A1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200B2AA1B1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L200B2AA1C1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200B2AA1D1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L200B2AF1A1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200B2AF1B1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L200B2AF1C1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200B2AF1D1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L200B2AB1A1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200B2AB1B1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L200B2AB1C1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200B2AB1D1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L200B2AC1A1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200B2AC1B1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L200B2AC1C1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200B2AC1D1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L200B2AD1A1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200B2AD1B1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L200B2AD1C1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200B2AD1D1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L200B2AE1A1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200B2AE1B1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L200B2AE1C1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200B2AE1D1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L200B3AA1A1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200B3AA1B1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L200B3AA1C1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200B3AA1D1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L200B3AF1A1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200B3AF1B1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L200B3AF1C1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200B3AF1D1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L200B3AB1A1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200B3AB1B1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L200B3AB1C1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200B3AB1D1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L200B3AC1A1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200B3AC1B1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L200B3AC1C1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200B3AC1D1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L200B3AD1A1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200B3AD1B1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L200B3AD1C1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200B3AD1D1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L200B3AE1A1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L200B3AE1B1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L200B3AE1C1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L200B3AE1D1N		Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L500U2AA1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U2AA1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L500U2AA1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U2AA1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L500U2BA1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U2BA1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
FSM3-L500U2BA1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U2BA1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
FSM3-L500U2AF1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U2AF1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L500U2AF1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U2AF1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L500U2BF1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U2BF1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L500U2BF1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U2BF1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L500U2AB1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U2AB1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L500U2AB1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U2AB1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L500U2BB1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U2BB1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L500U2BB1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U2BB1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L500U2AC1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U2AC1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L500U2AC1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U2AC1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L500U2BC1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U2BC1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
FSM3-L500U2BC1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U2BC1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
FSM3-L500U2AD1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U2AD1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L500U2AD1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U2AD1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L500U2BD1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U2BD1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L500U2BD1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U2BD1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L500U2AE1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U2AE1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L500U2AE1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U2AE1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L500U2BE1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U2BE1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L500U2BE1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U2BE1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L500U3AA1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U3AA1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L500U3AA1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U3AA1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L500U3BA1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U3BA1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
FSM3-L500U3BA1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U3BA1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
FSM3-L500U3AF1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U3AF1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L500U3AF1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U3AF1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L500U3BF1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U3BF1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L500U3BF1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U3BF1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L500U3AB1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U3AB1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L500U3AB1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U3AB1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L500U3BB1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U3BB1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L500U3BB1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U3BB1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L500U3AC1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U3AC1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L500U3AC1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U3AC1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L500U3BC1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U3BC1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
FSM3-L500U3BC1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U3BC1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
FSM3-L500U3AD1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U3AD1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L500U3AD1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U3AD1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L500U3BD1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U3BD1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L500U3BD1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U3BD1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L500U3AE1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U3AE1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L500U3AE1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U3AE1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L500U3BE1A1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500U3BE1B1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L500U3BE1C1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500U3BE1D1N		Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L500B2AA1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B2AA1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L500B2AA1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B2AA1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L500B2BA1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B2BA1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
FSM3-L500B2BA1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B2BA1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
FSM3-L500B2AF1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B2AF1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L500B2AF1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B2AF1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L500B2BF1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B2BF1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L500B2BF1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B2BF1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L500B2AB1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B2AB1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L500B2AB1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B2AB1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L500B2BB1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B2BB1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L500B2BB1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B2BB1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L500B2AC1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B2AC1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L500B2AC1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B2AC1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L500B2BC1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B2BC1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
FSM3-L500B2BC1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B2BC1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
FSM3-L500B2AD1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B2AD1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L500B2AD1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B2AD1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L500B2BD1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B2BD1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L500B2BD1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B2BD1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L500B2AE1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B2AE1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L500B2AE1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B2AE1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L500B2BE1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B2BE1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L500B2BE1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B2BE1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L500B3AA1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B3AA1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
FSM3-L500B3AA1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B3AA1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
FSM3-L500B3BA1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B3BA1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
FSM3-L500B3BA1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B3BA1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
FSM3-L500B3AF1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B3AF1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L500B3AF1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B3AF1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L500B3BF1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B3BF1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L500B3BF1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B3BF1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L500B3AB1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B3AB1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L500B3AB1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B3AB1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L500B3BB1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B3BB1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L500B3BB1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B3BB1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L500B3AC1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B3AC1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
FSM3-L500B3AC1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B3AC1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
FSM3-L500B3BC1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B3BC1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
FSM3-L500B3BC1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B3BC1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
FSM3-L500B3AD1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B3AD1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L500B3AD1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B3AD1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L500B3BD1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B3BD1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L500B3BD1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B3BD1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L500B3AE1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B3AE1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
FSM3-L500B3AE1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B3AE1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
FSM3-L500B3BE1A1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L500B3BE1B1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L500B3BE1C1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L500B3BE1D1N		Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L101U2BA1A1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101U2BA1B1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
FSM3-L101U2BA1C1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101U2BA1D1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
FSM3-L101U2BF1A1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101U2BF1B1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L101U2BF1C1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101U2BF1D1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L101U2BB1A1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101U2BB1B1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L101U2BB1C1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101U2BB1D1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L101U2BC1A1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101U2BC1B1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
FSM3-L101U2BC1C1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101U2BC1D1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
FSM3-L101U2BD1A1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101U2BD1B1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L101U2BD1C1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101U2BD1D1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L101U2BE1A1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101U2BE1B1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L101U2BE1C1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101U2BE1D1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L101U3BA1A1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101U3BA1B1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
FSM3-L101U3BA1C1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101U3BA1D1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
FSM3-L101U3BF1A1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101U3BF1B1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L101U3BF1C1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101U3BF1D1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L101U3BB1A1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101U3BB1B1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L101U3BB1C1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101U3BB1D1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L101U3BC1A1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101U3BC1B1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
FSM3-L101U3BC1C1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101U3BC1D1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
FSM3-L101U3BD1A1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101U3BD1B1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L101U3BD1C1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101U3BD1D1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L101U3BE1A1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101U3BE1B1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L101U3BE1C1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101U3BE1D1N		Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L101B2BA1A1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101B2BA1B1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
FSM3-L101B2BA1C1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101B2BA1D1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
FSM3-L101B2BF1A1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101B2BF1B1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L101B2BF1C1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101B2BF1D1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L101B2BB1A1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101B2BB1B1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L101B2BB1C1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101B2BB1D1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L101B2BC1A1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101B2BC1B1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
FSM3-L101B2BC1C1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101B2BC1D1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
FSM3-L101B2BD1A1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101B2BD1B1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L101B2BD1C1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101B2BD1D1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L101B2BE1A1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101B2BE1B1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L101B2BE1C1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101B2BE1D1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L101B3BA1A1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101B3BA1B1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
FSM3-L101B3BA1C1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101B3BA1D1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
FSM3-L101B3BF1A1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101B3BF1B1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L101B3BF1C1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101B3BF1D1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L101B3BB1A1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101B3BB1B1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L101B3BB1C1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101B3BB1D1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L101B3BC1A1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101B3BC1B1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
FSM3-L101B3BC1C1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101B3BC1D1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
FSM3-L101B3BD1A1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101B3BD1B1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L101B3BD1C1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101B3BD1D1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L101B3BE1A1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L101B3BE1B1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L101B3BE1C1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L101B3BE1D1N		Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L201U2BA1A1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201U2BA1B1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
FSM3-L201U2BA1C1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201U2BA1D1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
FSM3-L201U2BF1A1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201U2BF1B1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L201U2BF1C1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201U2BF1D1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L201U2BB1A1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201U2BB1B1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L201U2BB1C1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201U2BB1D1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L201U2BC1A1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201U2BC1B1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
FSM3-L201U2BC1C1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201U2BC1D1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
FSM3-L201U2BD1A1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201U2BD1B1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L201U2BD1C1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201U2BD1D1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L201U2BE1A1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201U2BE1B1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L201U2BE1C1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201U2BE1D1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L201U3BA1A1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201U3BA1B1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
FSM3-L201U3BA1C1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201U3BA1D1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
FSM3-L201U3BF1A1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201U3BF1B1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L201U3BF1C1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201U3BF1D1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L201U3BB1A1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201U3BB1B1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L201U3BB1C1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201U3BB1D1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L201U3BC1A1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201U3BC1B1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
FSM3-L201U3BC1C1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201U3BC1D1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
FSM3-L201U3BD1A1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201U3BD1B1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L201U3BD1C1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201U3BD1D1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L201U3BE1A1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201U3BE1B1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L201U3BE1C1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201U3BE1D1N		Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L201B2BA1A1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201B2BA1B1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
FSM3-L201B2BA1C1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201B2BA1D1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
FSM3-L201B2BF1A1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201B2BF1B1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L201B2BF1C1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201B2BF1D1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L201B2BB1A1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201B2BB1B1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L201B2BB1C1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201B2BB1D1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L201B2BC1A1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201B2BC1B1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
FSM3-L201B2BC1C1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201B2BC1D1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
FSM3-L201B2BD1A1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201B2BD1B1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L201B2BD1C1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201B2BD1D1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L201B2BE1A1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201B2BE1B1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L201B2BE1C1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201B2BE1D1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L201B3BA1A1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201B3BA1B1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
FSM3-L201B3BA1C1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201B3BA1D1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
FSM3-L201B3BF1A1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201B3BF1B1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L201B3BF1C1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201B3BF1D1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L201B3BB1A1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201B3BB1B1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L201B3BB1C1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201B3BB1D1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L201B3BC1A1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201B3BC1B1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
FSM3-L201B3BC1C1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201B3BC1D1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
FSM3-L201B3BD1A1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201B3BD1B1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L201B3BD1C1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201B3BD1D1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L201B3BE1A1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L201B3BE1B1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
FSM3-L201B3BE1C1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L201B3BE1D1N		Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
FSM3-L501U2CA1A1N		Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L501U2CA1B1N		Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 2 NPN
FSM3-L501U2CA1C1N		Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L501U2CA1D1N		Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 2 PNP
FSM3-L501U2CF1A1N		Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L501U2CF1B1N		Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L501U2CF1C1N		Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L501U2CF1D1N		Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L501U2CB1A1N		Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L501U2CB1B1N		Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L501U2CB1C1N		Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L501U2CB1D1N		Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L501U2CC1A1N		Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L501U2CC1B1N		Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 2 NPN
FSM3-L501U2CC1C1N		Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L501U2CC1D1N		Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 2 PNP
FSM3-L501B2CA1A1N		Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L501B2CA1B1N		Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 2 NPN
FSM3-L501B2CA1C1N		Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L501B2CA1D1N		Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 2 PNP
FSM3-L501B2CF1A1N		Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L501B2CF1B1N		Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L501B2CF1C1N		Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L501B2CF1D1N		Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L501B2CB1A1N		Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L501B2CB1B1N		Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L501B2CB1C1N		Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L501B2CB1D1N		Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L501B2CC1A1N		Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L501B2CC1B1N		Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 2 NPN
FSM3-L501B2CC1C1N		Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L501B2CC1D1N		Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 2 PNP
FSM3-L102U2CA1A1N		Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L102U2CA1B1N		Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 2 NPN
FSM3-L102U2CA1C1N		Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L102U2CA1D1N		Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 2 PNP
FSM3-L102U2CF1A1N		Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L102U2CF1B1N		Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L102U2CF1C1N		Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L102U2CF1D1N		Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L102U2CB1A1N		Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L102U2CB1B1N		Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L102U2CB1C1N		Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L102U2CB1D1N		Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L102U2CC1A1N		Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L102U2CC1B1N		Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 2 NPN
FSM3-L102U2CC1C1N		Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L102U2CC1D1N		Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 2 PNP
FSM3-L102B2CA1A1N		Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L102B2CA1B1N		Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 2 NPN
FSM3-L102B2CA1C1N		Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L102B2CA1D1N		Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 2 PNP
FSM3-L102B2CF1A1N		Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L102B2CF1B1N		Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 2 NPN
FSM3-L102B2CF1C1N		Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L102B2CF1D1N		Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 2 PNP
FSM3-L102B2CB1A1N		Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
FSM3-L102B2CB1B1N		Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
FSM3-L102B2CB1C1N		Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
FSM3-L102B2CB1D1N		Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
FSM3-L102B2CC1A1N		Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 1 NPN, setting copy
FSM3-L102B2CC1B1N		Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 2 NPN
FSM3-L102B2CC1C1N		Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 1 PNP, setting copy
FSM3-L102B2CC1D1N		Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 2 PNP

Flow SensorsCKD

1024 product codes available in this family

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CKD FSM3 Rapiflow Flow Sensor (LCD, Stainless Body, 1-5V Output)

Brand CKD·Flow Sensors

Available part numbers (1024)

FSM3-L005U2AA1A1N, FSM3-L005U2AA1B1N, FSM3-L005U2AA1C1N, FSM3-L005U2AA1D1N, FSM3-L005U2AF1A1N, FSM3-L005U2AF1B1N, FSM3-L005U2AF1C1N, FSM3-L005U2AF1D1N, FSM3-L005U2AB1A1N, FSM3-L005U2AB1B1N + 1014 more — see full table ↓

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	Product code	Spec
	FSM3-L005U2AA1A1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005U2AA1B1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L005U2AA1C1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005U2AA1D1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L005U2AF1A1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005U2AF1B1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L005U2AF1C1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005U2AF1D1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L005U2AB1A1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005U2AB1B1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L005U2AB1C1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005U2AB1D1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L005U2AC1A1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005U2AC1B1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L005U2AC1C1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005U2AC1D1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L005U2AD1A1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005U2AD1B1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L005U2AD1C1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005U2AD1D1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L005U2AE1A1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005U2AE1B1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L005U2AE1C1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005U2AE1D1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L005U3AA1A1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005U3AA1B1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L005U3AA1C1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005U3AA1D1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L005U3AF1A1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005U3AF1B1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L005U3AF1C1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005U3AF1D1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L005U3AB1A1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005U3AB1B1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L005U3AB1C1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005U3AB1D1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L005U3AC1A1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005U3AC1B1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L005U3AC1C1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005U3AC1D1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L005U3AD1A1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005U3AD1B1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L005U3AD1C1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005U3AD1D1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L005U3AE1A1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005U3AE1B1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L005U3AE1C1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005U3AE1D1N	Flow range: 500 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L005B2AA1A1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005B2AA1B1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L005B2AA1C1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005B2AA1D1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L005B2AF1A1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005B2AF1B1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L005B2AF1C1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005B2AF1D1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L005B2AB1A1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005B2AB1B1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L005B2AB1C1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005B2AB1D1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L005B2AC1A1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005B2AC1B1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L005B2AC1C1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005B2AC1D1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L005B2AD1A1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005B2AD1B1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L005B2AD1C1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005B2AD1D1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L005B2AE1A1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005B2AE1B1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L005B2AE1C1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005B2AE1D1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L005B3AA1A1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005B3AA1B1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L005B3AA1C1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005B3AA1D1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L005B3AF1A1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005B3AF1B1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L005B3AF1C1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005B3AF1D1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L005B3AB1A1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005B3AB1B1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L005B3AB1C1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005B3AB1D1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L005B3AC1A1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005B3AC1B1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L005B3AC1C1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005B3AC1D1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L005B3AD1A1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005B3AD1B1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L005B3AD1C1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005B3AD1D1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L005B3AE1A1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L005B3AE1B1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L005B3AE1C1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L005B3AE1D1N	Flow range: 500 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L010U2AA1A1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010U2AA1B1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L010U2AA1C1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010U2AA1D1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L010U2AF1A1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010U2AF1B1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L010U2AF1C1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010U2AF1D1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L010U2AB1A1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010U2AB1B1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L010U2AB1C1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010U2AB1D1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L010U2AC1A1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010U2AC1B1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L010U2AC1C1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010U2AC1D1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L010U2AD1A1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010U2AD1B1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L010U2AD1C1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010U2AD1D1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L010U2AE1A1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010U2AE1B1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L010U2AE1C1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010U2AE1D1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L010U3AA1A1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010U3AA1B1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L010U3AA1C1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010U3AA1D1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L010U3AF1A1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010U3AF1B1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L010U3AF1C1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010U3AF1D1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L010U3AB1A1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010U3AB1B1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L010U3AB1C1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010U3AB1D1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L010U3AC1A1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010U3AC1B1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L010U3AC1C1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010U3AC1D1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L010U3AD1A1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010U3AD1B1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L010U3AD1C1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010U3AD1D1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L010U3AE1A1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010U3AE1B1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L010U3AE1C1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010U3AE1D1N	Flow range: 1000 mL/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L010B2AA1A1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010B2AA1B1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L010B2AA1C1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010B2AA1D1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L010B2AF1A1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010B2AF1B1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L010B2AF1C1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010B2AF1D1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L010B2AB1A1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010B2AB1B1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L010B2AB1C1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010B2AB1D1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L010B2AC1A1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010B2AC1B1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L010B2AC1C1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010B2AC1D1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L010B2AD1A1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010B2AD1B1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L010B2AD1C1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010B2AD1D1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L010B2AE1A1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010B2AE1B1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L010B2AE1C1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010B2AE1D1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L010B3AA1A1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010B3AA1B1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L010B3AA1C1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010B3AA1D1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L010B3AF1A1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010B3AF1B1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L010B3AF1C1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010B3AF1D1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L010B3AB1A1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010B3AB1B1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L010B3AB1C1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010B3AB1D1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L010B3AC1A1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010B3AC1B1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L010B3AC1C1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010B3AC1D1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L010B3AD1A1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010B3AD1B1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L010B3AD1C1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010B3AD1D1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L010B3AE1A1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L010B3AE1B1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L010B3AE1C1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L010B3AE1D1N	Flow range: 1000 mL/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L020U2AA1A1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020U2AA1B1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L020U2AA1C1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020U2AA1D1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L020U2AF1A1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020U2AF1B1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L020U2AF1C1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020U2AF1D1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L020U2AB1A1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020U2AB1B1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L020U2AB1C1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020U2AB1D1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L020U2AC1A1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020U2AC1B1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L020U2AC1C1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020U2AC1D1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L020U2AD1A1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020U2AD1B1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L020U2AD1C1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020U2AD1D1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L020U2AE1A1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020U2AE1B1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L020U2AE1C1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020U2AE1D1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L020U3AA1A1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020U3AA1B1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L020U3AA1C1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020U3AA1D1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L020U3AF1A1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020U3AF1B1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L020U3AF1C1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020U3AF1D1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L020U3AB1A1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020U3AB1B1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L020U3AB1C1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020U3AB1D1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L020U3AC1A1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020U3AC1B1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L020U3AC1C1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020U3AC1D1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L020U3AD1A1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020U3AD1B1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L020U3AD1C1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020U3AD1D1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L020U3AE1A1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020U3AE1B1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L020U3AE1C1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020U3AE1D1N	Flow range: 2 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L020B2AA1A1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020B2AA1B1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L020B2AA1C1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020B2AA1D1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L020B2AF1A1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020B2AF1B1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L020B2AF1C1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020B2AF1D1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L020B2AB1A1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020B2AB1B1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L020B2AB1C1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020B2AB1D1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L020B2AC1A1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020B2AC1B1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L020B2AC1C1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020B2AC1D1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L020B2AD1A1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020B2AD1B1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L020B2AD1C1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020B2AD1D1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L020B2AE1A1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020B2AE1B1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L020B2AE1C1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020B2AE1D1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L020B3AA1A1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020B3AA1B1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L020B3AA1C1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020B3AA1D1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L020B3AF1A1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020B3AF1B1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L020B3AF1C1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020B3AF1D1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L020B3AB1A1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020B3AB1B1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L020B3AB1C1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020B3AB1D1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L020B3AC1A1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020B3AC1B1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L020B3AC1C1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020B3AC1D1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L020B3AD1A1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020B3AD1B1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L020B3AD1C1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020B3AD1D1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L020B3AE1A1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L020B3AE1B1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L020B3AE1C1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L020B3AE1D1N	Flow range: 2 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L050U2AA1A1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050U2AA1B1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L050U2AA1C1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050U2AA1D1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L050U2AF1A1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050U2AF1B1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L050U2AF1C1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050U2AF1D1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L050U2AB1A1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050U2AB1B1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L050U2AB1C1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050U2AB1D1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L050U2AC1A1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050U2AC1B1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L050U2AC1C1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050U2AC1D1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L050U2AD1A1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050U2AD1B1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L050U2AD1C1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050U2AD1D1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L050U2AE1A1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050U2AE1B1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L050U2AE1C1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050U2AE1D1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L050U3AA1A1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050U3AA1B1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L050U3AA1C1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050U3AA1D1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L050U3AF1A1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050U3AF1B1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L050U3AF1C1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050U3AF1D1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L050U3AB1A1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050U3AB1B1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L050U3AB1C1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050U3AB1D1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L050U3AC1A1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050U3AC1B1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L050U3AC1C1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050U3AC1D1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L050U3AD1A1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050U3AD1B1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L050U3AD1C1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050U3AD1D1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L050U3AE1A1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050U3AE1B1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L050U3AE1C1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050U3AE1D1N	Flow range: 5 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L050B2AA1A1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050B2AA1B1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L050B2AA1C1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050B2AA1D1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L050B2AF1A1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050B2AF1B1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L050B2AF1C1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050B2AF1D1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L050B2AB1A1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050B2AB1B1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L050B2AB1C1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050B2AB1D1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L050B2AC1A1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050B2AC1B1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L050B2AC1C1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050B2AC1D1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L050B2AD1A1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050B2AD1B1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L050B2AD1C1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050B2AD1D1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L050B2AE1A1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050B2AE1B1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L050B2AE1C1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050B2AE1D1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L050B3AA1A1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050B3AA1B1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L050B3AA1C1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050B3AA1D1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L050B3AF1A1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050B3AF1B1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L050B3AF1C1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050B3AF1D1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L050B3AB1A1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050B3AB1B1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L050B3AB1C1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050B3AB1D1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L050B3AC1A1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050B3AC1B1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L050B3AC1C1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050B3AC1D1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L050B3AD1A1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050B3AD1B1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L050B3AD1C1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050B3AD1D1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L050B3AE1A1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L050B3AE1B1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L050B3AE1C1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L050B3AE1D1N	Flow range: 5 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L100U2AA1A1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100U2AA1B1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L100U2AA1C1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100U2AA1D1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L100U2AF1A1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100U2AF1B1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L100U2AF1C1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100U2AF1D1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L100U2AB1A1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100U2AB1B1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L100U2AB1C1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100U2AB1D1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L100U2AC1A1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100U2AC1B1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L100U2AC1C1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100U2AC1D1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L100U2AD1A1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100U2AD1B1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L100U2AD1C1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100U2AD1D1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L100U2AE1A1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100U2AE1B1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L100U2AE1C1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100U2AE1D1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L100U3AA1A1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100U3AA1B1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L100U3AA1C1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100U3AA1D1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L100U3AF1A1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100U3AF1B1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L100U3AF1C1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100U3AF1D1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L100U3AB1A1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100U3AB1B1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L100U3AB1C1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100U3AB1D1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L100U3AC1A1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100U3AC1B1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L100U3AC1C1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100U3AC1D1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L100U3AD1A1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100U3AD1B1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L100U3AD1C1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100U3AD1D1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L100U3AE1A1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100U3AE1B1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L100U3AE1C1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100U3AE1D1N	Flow range: 10 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L100B2AA1A1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100B2AA1B1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L100B2AA1C1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100B2AA1D1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L100B2AF1A1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100B2AF1B1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L100B2AF1C1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100B2AF1D1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L100B2AB1A1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100B2AB1B1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L100B2AB1C1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100B2AB1D1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L100B2AC1A1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100B2AC1B1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L100B2AC1C1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100B2AC1D1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L100B2AD1A1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100B2AD1B1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L100B2AD1C1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100B2AD1D1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L100B2AE1A1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100B2AE1B1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L100B2AE1C1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100B2AE1D1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L100B3AA1A1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100B3AA1B1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L100B3AA1C1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100B3AA1D1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L100B3AF1A1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100B3AF1B1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L100B3AF1C1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100B3AF1D1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L100B3AB1A1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100B3AB1B1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L100B3AB1C1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100B3AB1D1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L100B3AC1A1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100B3AC1B1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L100B3AC1C1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100B3AC1D1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L100B3AD1A1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100B3AD1B1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L100B3AD1C1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100B3AD1D1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L100B3AE1A1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L100B3AE1B1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L100B3AE1C1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L100B3AE1D1N	Flow range: 10 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L200U2AA1A1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200U2AA1B1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L200U2AA1C1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200U2AA1D1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L200U2AF1A1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200U2AF1B1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L200U2AF1C1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200U2AF1D1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L200U2AB1A1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200U2AB1B1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L200U2AB1C1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200U2AB1D1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L200U2AC1A1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200U2AC1B1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L200U2AC1C1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200U2AC1D1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L200U2AD1A1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200U2AD1B1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L200U2AD1C1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200U2AD1D1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L200U2AE1A1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200U2AE1B1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L200U2AE1C1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200U2AE1D1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L200U3AA1A1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200U3AA1B1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L200U3AA1C1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200U3AA1D1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L200U3AF1A1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200U3AF1B1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L200U3AF1C1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200U3AF1D1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L200U3AB1A1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200U3AB1B1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L200U3AB1C1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200U3AB1D1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L200U3AC1A1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200U3AC1B1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L200U3AC1C1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200U3AC1D1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L200U3AD1A1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200U3AD1B1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L200U3AD1C1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200U3AD1D1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L200U3AE1A1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200U3AE1B1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L200U3AE1C1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200U3AE1D1N	Flow range: 20 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L200B2AA1A1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200B2AA1B1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L200B2AA1C1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200B2AA1D1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L200B2AF1A1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200B2AF1B1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L200B2AF1C1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200B2AF1D1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L200B2AB1A1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200B2AB1B1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L200B2AB1C1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200B2AB1D1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L200B2AC1A1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200B2AC1B1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L200B2AC1C1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200B2AC1D1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L200B2AD1A1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200B2AD1B1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L200B2AD1C1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200B2AD1D1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L200B2AE1A1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200B2AE1B1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L200B2AE1C1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200B2AE1D1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L200B3AA1A1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200B3AA1B1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L200B3AA1C1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200B3AA1D1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L200B3AF1A1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200B3AF1B1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L200B3AF1C1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200B3AF1D1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L200B3AB1A1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200B3AB1B1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L200B3AB1C1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200B3AB1D1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L200B3AC1A1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200B3AC1B1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L200B3AC1C1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200B3AC1D1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L200B3AD1A1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200B3AD1B1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L200B3AD1C1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200B3AD1D1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L200B3AE1A1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L200B3AE1B1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L200B3AE1C1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L200B3AE1D1N	Flow range: 20 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L500U2AA1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U2AA1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L500U2AA1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U2AA1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L500U2BA1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U2BA1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
	FSM3-L500U2BA1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U2BA1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
	FSM3-L500U2AF1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U2AF1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L500U2AF1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U2AF1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L500U2BF1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U2BF1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L500U2BF1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U2BF1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L500U2AB1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U2AB1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L500U2AB1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U2AB1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L500U2BB1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U2BB1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L500U2BB1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U2BB1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L500U2AC1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U2AC1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L500U2AC1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U2AC1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L500U2BC1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U2BC1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
	FSM3-L500U2BC1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U2BC1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
	FSM3-L500U2AD1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U2AD1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L500U2AD1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U2AD1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L500U2BD1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U2BD1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L500U2BD1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U2BD1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L500U2AE1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U2AE1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L500U2AE1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U2AE1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L500U2BE1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U2BE1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L500U2BE1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U2BE1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L500U3AA1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U3AA1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L500U3AA1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U3AA1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L500U3BA1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U3BA1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
	FSM3-L500U3BA1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U3BA1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
	FSM3-L500U3AF1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U3AF1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L500U3AF1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U3AF1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L500U3BF1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U3BF1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L500U3BF1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U3BF1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L500U3AB1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U3AB1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L500U3AB1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U3AB1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L500U3BB1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U3BB1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L500U3BB1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U3BB1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L500U3AC1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U3AC1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L500U3AC1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U3AC1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L500U3BC1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U3BC1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
	FSM3-L500U3BC1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U3BC1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
	FSM3-L500U3AD1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U3AD1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L500U3AD1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U3AD1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L500U3BD1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U3BD1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L500U3BD1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U3BD1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L500U3AE1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U3AE1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L500U3AE1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U3AE1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L500U3BE1A1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500U3BE1B1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L500U3BE1C1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500U3BE1D1N	Flow range: 50 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L500B2AA1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B2AA1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L500B2AA1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B2AA1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L500B2BA1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B2BA1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
	FSM3-L500B2BA1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B2BA1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
	FSM3-L500B2AF1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B2AF1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L500B2AF1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B2AF1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L500B2BF1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B2BF1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L500B2BF1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B2BF1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L500B2AB1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B2AB1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L500B2AB1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B2AB1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L500B2BB1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B2BB1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L500B2BB1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B2BB1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L500B2AC1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B2AC1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L500B2AC1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B2AC1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L500B2BC1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B2BC1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
	FSM3-L500B2BC1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B2BC1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
	FSM3-L500B2AD1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B2AD1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L500B2AD1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B2AD1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L500B2BD1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B2BD1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L500B2BD1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B2BD1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L500B2AE1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B2AE1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L500B2AE1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B2AE1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L500B2BE1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B2BE1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L500B2BE1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B2BE1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L500B3AA1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B3AA1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 NPN
	FSM3-L500B3AA1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B3AA1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/8 \| Output: 1-5V + 2 PNP
	FSM3-L500B3BA1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B3BA1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
	FSM3-L500B3BA1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B3BA1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
	FSM3-L500B3AF1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B3AF1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L500B3AF1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B3AF1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L500B3BF1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B3BF1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L500B3BF1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B3BF1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L500B3AB1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B3AB1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L500B3AB1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B3AB1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/8 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L500B3BB1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B3BB1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L500B3BB1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B3BB1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L500B3AC1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B3AC1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 NPN
	FSM3-L500B3AC1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B3AC1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/8 \| Output: 1-5V + 2 PNP
	FSM3-L500B3BC1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B3BC1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
	FSM3-L500B3BC1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B3BC1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
	FSM3-L500B3AD1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B3AD1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L500B3AD1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B3AD1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L500B3BD1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B3BD1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L500B3BD1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B3BD1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L500B3AE1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B3AE1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L500B3AE1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B3AE1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (to 50 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L500B3BE1A1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L500B3BE1B1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L500B3BE1C1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L500B3BE1D1N	Flow range: 50 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L101U2BA1A1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101U2BA1B1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
	FSM3-L101U2BA1C1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101U2BA1D1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
	FSM3-L101U2BF1A1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101U2BF1B1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L101U2BF1C1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101U2BF1D1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L101U2BB1A1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101U2BB1B1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L101U2BB1C1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101U2BB1D1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L101U2BC1A1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101U2BC1B1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
	FSM3-L101U2BC1C1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101U2BC1D1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
	FSM3-L101U2BD1A1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101U2BD1B1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L101U2BD1C1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101U2BD1D1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L101U2BE1A1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101U2BE1B1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L101U2BE1C1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101U2BE1D1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L101U3BA1A1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101U3BA1B1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
	FSM3-L101U3BA1C1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101U3BA1D1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
	FSM3-L101U3BF1A1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101U3BF1B1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L101U3BF1C1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101U3BF1D1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L101U3BB1A1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101U3BB1B1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L101U3BB1C1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101U3BB1D1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L101U3BC1A1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101U3BC1B1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
	FSM3-L101U3BC1C1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101U3BC1D1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
	FSM3-L101U3BD1A1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101U3BD1B1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L101U3BD1C1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101U3BD1D1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L101U3BE1A1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101U3BE1B1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L101U3BE1C1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101U3BE1D1N	Flow range: 100 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L101B2BA1A1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101B2BA1B1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
	FSM3-L101B2BA1C1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101B2BA1D1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
	FSM3-L101B2BF1A1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101B2BF1B1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L101B2BF1C1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101B2BF1D1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L101B2BB1A1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101B2BB1B1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L101B2BB1C1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101B2BB1D1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L101B2BC1A1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101B2BC1B1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
	FSM3-L101B2BC1C1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101B2BC1D1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
	FSM3-L101B2BD1A1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101B2BD1B1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L101B2BD1C1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101B2BD1D1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L101B2BE1A1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101B2BE1B1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L101B2BE1C1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101B2BE1D1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L101B3BA1A1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101B3BA1B1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
	FSM3-L101B3BA1C1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101B3BA1D1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
	FSM3-L101B3BF1A1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101B3BF1B1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L101B3BF1C1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101B3BF1D1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L101B3BB1A1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101B3BB1B1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L101B3BB1C1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101B3BB1D1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L101B3BC1A1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101B3BC1B1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
	FSM3-L101B3BC1C1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101B3BC1D1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
	FSM3-L101B3BD1A1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101B3BD1B1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L101B3BD1C1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101B3BD1D1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L101B3BE1A1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L101B3BE1B1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L101B3BE1C1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L101B3BE1D1N	Flow range: 100 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L201U2BA1A1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201U2BA1B1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
	FSM3-L201U2BA1C1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201U2BA1D1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
	FSM3-L201U2BF1A1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201U2BF1B1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L201U2BF1C1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201U2BF1D1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L201U2BB1A1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201U2BB1B1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L201U2BB1C1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201U2BB1D1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L201U2BC1A1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201U2BC1B1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
	FSM3-L201U2BC1C1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201U2BC1D1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
	FSM3-L201U2BD1A1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201U2BD1B1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L201U2BD1C1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201U2BD1D1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L201U2BE1A1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201U2BE1B1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L201U2BE1C1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201U2BE1D1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L201U3BA1A1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201U3BA1B1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
	FSM3-L201U3BA1C1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201U3BA1D1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
	FSM3-L201U3BF1A1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201U3BF1B1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L201U3BF1C1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201U3BF1D1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L201U3BB1A1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201U3BB1B1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L201U3BB1C1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201U3BB1D1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L201U3BC1A1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201U3BC1B1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
	FSM3-L201U3BC1C1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201U3BC1D1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
	FSM3-L201U3BD1A1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201U3BD1B1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L201U3BD1C1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201U3BD1D1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L201U3BE1A1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201U3BE1B1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L201U3BE1C1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201U3BE1D1N	Flow range: 200 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L201B2BA1A1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201B2BA1B1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
	FSM3-L201B2BA1C1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201B2BA1D1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
	FSM3-L201B2BF1A1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201B2BF1B1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L201B2BF1C1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201B2BF1D1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L201B2BB1A1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201B2BB1B1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L201B2BB1C1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201B2BB1D1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L201B2BC1A1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201B2BC1B1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
	FSM3-L201B2BC1C1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201B2BC1D1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
	FSM3-L201B2BD1A1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201B2BD1B1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L201B2BD1C1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201B2BD1D1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L201B2BE1A1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201B2BE1B1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L201B2BE1C1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201B2BE1D1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L201B3BA1A1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201B3BA1B1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 NPN
	FSM3-L201B3BA1C1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201B3BA1D1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: Rc1/4 \| Output: 1-5V + 2 PNP
	FSM3-L201B3BF1A1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201B3BF1B1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L201B3BF1C1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201B3BF1D1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L201B3BB1A1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201B3BB1B1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L201B3BB1C1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201B3BB1D1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: G1/4 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L201B3BC1A1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201B3BC1B1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 NPN
	FSM3-L201B3BC1C1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201B3BC1D1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: NPT1/4 \| Output: 1-5V + 2 PNP
	FSM3-L201B3BD1A1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201B3BD1B1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L201B3BD1C1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201B3BD1D1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in bite fitting (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L201B3BE1A1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L201B3BE1B1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 NPN
	FSM3-L201B3BE1C1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L201B3BE1D1N	Flow range: 200 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, oxygen (oil-free) \| Connection: 1/4 in JXR male (50-200 L/min) \| Output: 1-5V + 2 PNP
	FSM3-L501U2CA1A1N	Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L501U2CA1B1N	Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 2 NPN
	FSM3-L501U2CA1C1N	Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L501U2CA1D1N	Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 2 PNP
	FSM3-L501U2CF1A1N	Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L501U2CF1B1N	Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L501U2CF1C1N	Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L501U2CF1D1N	Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L501U2CB1A1N	Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L501U2CB1B1N	Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L501U2CB1C1N	Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L501U2CB1D1N	Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L501U2CC1A1N	Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L501U2CC1B1N	Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 2 NPN
	FSM3-L501U2CC1C1N	Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L501U2CC1D1N	Flow range: 500 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 2 PNP
	FSM3-L501B2CA1A1N	Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L501B2CA1B1N	Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 2 NPN
	FSM3-L501B2CA1C1N	Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L501B2CA1D1N	Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 2 PNP
	FSM3-L501B2CF1A1N	Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L501B2CF1B1N	Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L501B2CF1C1N	Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L501B2CF1D1N	Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L501B2CB1A1N	Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L501B2CB1B1N	Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L501B2CB1C1N	Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L501B2CB1D1N	Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L501B2CC1A1N	Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L501B2CC1B1N	Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 2 NPN
	FSM3-L501B2CC1C1N	Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L501B2CC1D1N	Flow range: 500 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 2 PNP
	FSM3-L102U2CA1A1N	Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L102U2CA1B1N	Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 2 NPN
	FSM3-L102U2CA1C1N	Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L102U2CA1D1N	Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 2 PNP
	FSM3-L102U2CF1A1N	Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L102U2CF1B1N	Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L102U2CF1C1N	Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L102U2CF1D1N	Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L102U2CB1A1N	Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L102U2CB1B1N	Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L102U2CB1C1N	Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L102U2CB1D1N	Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L102U2CC1A1N	Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L102U2CC1B1N	Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 2 NPN
	FSM3-L102U2CC1C1N	Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L102U2CC1D1N	Flow range: 1000 L/min \| Flow direction: Unidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 2 PNP
	FSM3-L102B2CA1A1N	Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L102B2CA1B1N	Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 2 NPN
	FSM3-L102B2CA1C1N	Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L102B2CA1D1N	Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: Rc1/2 \| Output: 1-5V + 2 PNP
	FSM3-L102B2CF1A1N	Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L102B2CF1B1N	Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 2 NPN
	FSM3-L102B2CF1C1N	Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L102B2CF1D1N	Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (ISO 16030) \| Output: 1-5V + 2 PNP
	FSM3-L102B2CB1A1N	Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L102B2CB1B1N	Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 NPN
	FSM3-L102B2CB1C1N	Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L102B2CB1D1N	Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: G1/2 (JIS B 2351-1 O-ring) \| Output: 1-5V + 2 PNP
	FSM3-L102B2CC1A1N	Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 1 NPN, setting copy
	FSM3-L102B2CC1B1N	Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 2 NPN
	FSM3-L102B2CC1C1N	Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 1 PNP, setting copy
	FSM3-L102B2CC1D1N	Flow range: 1000 L/min \| Flow direction: Bidirectional \| Body / fluid: SUS, air/gas \| Connection: NPT1/2 \| Output: 1-5V + 2 PNP

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CKD FSM3 Rapiflow Flow Sensor (LCD, Stainless Body, 1-5V Output)