• SMC PFMV5 Flow Sensor (Micro Flow, 0.1 to 3 L/min)
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SMC PFMV5 Flow Sensor (Micro Flow, 0.1 to 3 L/min)

SMC PFMV5 Flow Sensor (Micro Flow, 0.1 to 3 L/min)

SMC PFMV5 series compact MEMS flow sensor for confirming adsorption of tiny workpieces by detecting micro flow rates of dry air or N2, with 1 to 5 V analog output.

Key features

  • Rated flow ranges 0 to 0.1, 0.5, 1 and 3 L/min, plus bidirectional types -0.5 to 0.5, -1 to 1 and -3 to 3 L/min
  • Response time 5 ms or less (90% response); repeatability ±2% F.S.
  • Works under vacuum and positive pressure: rated -70 to 300 kPa, operating -100 to 400 kPa
  • Grease-free fluid path; M5x0.8 port; 10 g body
  • L-bracket (suffix A) and no-manual (N) options; manifold brackets ZS-36-A1 to A5 for 1 to 5 stations
  • Pairs with PFGV301 3-screen digital flow monitor; ZFC050 small suction filter recommended upstream

Specifications

Fluid Dry air, N2
Output Analog 1 to 5 V (non-linear), approx. 1 kOhm
Accuracy ±5% F.S.
Repeatability ±2% F.S.
Proof pressure 500 kPa
Port size M5x0.8
Power supply 12 to 24 VDC ±10%, 16 mA or less
Enclosure IP40
Operating temperature 0 to 50°C (no condensation or freezing)
Lead wire 3-core cable ø2.6, 2 m
Standards CE/UKCA, UL (CSA)
Source SMC Korea catalog CAT.KS100-67D (SMCKR_PFMV.pdf), PDF p. 7-8
PFMV505-1-X502 Flow range: 0 to 0.1 L/min | Flow direction: Unidirectional
PFMV505-1 Flow range: 0 to 0.5 L/min | Flow direction: Unidirectional
PFMV510-1 Flow range: 0 to 1.0 L/min | Flow direction: Unidirectional
PFMV530-1 Flow range: 0 to 3.0 L/min | Flow direction: Unidirectional
PFMV505F-1 Flow range: -0.5 to 0.5 L/min (bidirectional) | Flow direction: Bidirectional
PFMV510F-1 Flow range: -1.0 to 1.0 L/min (bidirectional) | Flow direction: Bidirectional
PFMV530F-1 Flow range: -3.0 to 3.0 L/min (bidirectional) | Flow direction: Bidirectional
Flow SwitchesSMC
7 product codes available in this family
Sourced direct from KoreaExport-ready supplyCompetitive pricing
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SMC PFMV5 Flow Sensor (Micro Flow, 0.1 to 3 L/min)

Brand SMC·Flow Switches

Available part numbers (7)

PFMV505-1-X502, PFMV505-1, PFMV510-1, PFMV530-1, PFMV505F-1, PFMV510F-1, PFMV530F-1

How to order

Send the SMC part numbers and quantities through our RFQ form or to info@prosourcemro.com. We confirm price, availability and lead time within 1 business day — no account needed.

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Product codes & specifications
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Product codeSpec
PFMV505-1-X502Flow range: 0 to 0.1 L/min | Flow direction: Unidirectional
PFMV505-1Flow range: 0 to 0.5 L/min | Flow direction: Unidirectional
PFMV510-1Flow range: 0 to 1.0 L/min | Flow direction: Unidirectional
PFMV530-1Flow range: 0 to 3.0 L/min | Flow direction: Unidirectional
PFMV505F-1Flow range: -0.5 to 0.5 L/min (bidirectional) | Flow direction: Bidirectional
PFMV510F-1Flow range: -1.0 to 1.0 L/min (bidirectional) | Flow direction: Bidirectional
PFMV530F-1Flow range: -3.0 to 3.0 L/min (bidirectional) | Flow direction: Bidirectional

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