• WISE UFS100 UHP Excess Flow Switch
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WISE UFS100 UHP Excess Flow Switch

WISE UFS100 UHP Excess Flow Switch

Ultra-high-purity excess flow switch with face-seal fittings that alarms at a set gas flow for semiconductor gas lines.

Specifications

Industries (catalogs) Semiconductor
UFS100 Product: UHP Excess Flow Switch | Process Connection: ·Male or female face seal fitting / ·Fitting size: ¼”, ½” | Material: Body · Float: 316L SS | Working Temperature: -40~125°C | Alarm Point: 2 / 5 / 10 / 25 / 50 / 100 slpm(N2 at 100psig) | Accuracy: ±10 % of Alarm point(Min. 0.5slpm) | Internal Surface Finish: Ra ≤ 0.13㎛ | Proof Pressure: 150% of Oper. Pressure | Burst Pressure: 300% of Oper. Pressure
Flow SwitchesWISE
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WISE UFS100 UHP Excess Flow Switch

Brand WISE·Flow Switches

Available part numbers (1)

UFS100

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UFS100Product: UHP Excess Flow Switch | Process Connection: ·Male or female face seal fitting / ·Fitting size: ¼”, ½” | Material: Body · Float: 316L SS | Working Temperature: -40~125°C | Alarm Point: 2 / 5 / 10 / 25 / 50 / 100 slpm(N2 at 100psig) | Accuracy: ±10 % of Alarm point(Min. 0.5slpm) | Internal Surface Finish: Ra ≤ 0.13㎛ | Proof Pressure: 150% of Oper. Pressure | Burst Pressure: 300% of Oper. Pressure

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