• SMC HRZ-F Thermo-Chiller (Inverter Type, R410A/R448A, 2 to 10 kW)
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SMC HRZ-F Thermo-Chiller (Inverter Type, R410A/R448A, 2 to 10 kW)

SMC HRZ-F Thermo-Chiller (Inverter Type, R410A/R448A, 2 to 10 kW)

SMC HRZ-F series water-cooled thermo-chiller with DC inverter refrigerator and inverter pump for semiconductor processes, handling fluorinated fluid, ethylene glycol or clear/DI water over a wide -20 to 90 C range.

Key features

  • Pump & refrigerator inverter type (W...S) in 2, 4, 8 and 10 kW; pump inverter type HRZ008-L for -20 to 40 C
  • Circulating fluids: fluorinated fluid (Fluorinert / GALDEN), 60% ethylene glycol aqueous solution, clear or DI water
  • Temperature stability +/-0.1 C, PID control; built-in flow control by pump inverter
  • Contact I/O (D-sub 25P) and serial RS-485 (D-sub 9P) communication standard; SEMI, CE/UKCA, UL compliant
  • Option 1: C (analog communication), D (DeviceNet); option 2: N (NPT fitting), W (SI units fixed), Y (DI control kit), Z (circulating fluid auto recovery)

Specifications

Cooling method Water-cooled refrigeration, 1 channel
Refrigerant R410A (HFC) / R448A (HFC/HFO, HRZ008-L)
Temperature control PID control
Temperature stability +/-0.1 C
Power supply 3-ph AC200/200-208V (50/60Hz)
Circulating fluid ports Rc3/4 (drain Rc3/8)
Facility water ports Rc1/2
Facility water temperature 10 to 30 C (W type), 10 to 25 C (L type)
Ambient 10 to 35 C, 30 to 70% RH
Port thread Rc (NPT fittings: option N)
Source SMC Korea catalog HRZ-F (SMCKR_HRZ-F.pdf), p. 10-14
HRZ002-WS-F Type: Pump & refrigerator inverter | Circulating fluid: Fluorinated fluid | Cooling capacity: 2 kW (0.5 kW at -10 C) | Set temp range: -10 to 90 C
HRZ004-WS-F Type: Pump & refrigerator inverter | Circulating fluid: Fluorinated fluid | Cooling capacity: 4 kW (2 kW at -10 C) | Set temp range: -20 to 90 C
HRZ008-WS-F Type: Pump & refrigerator inverter | Circulating fluid: Fluorinated fluid | Cooling capacity: 8 kW (4 kW at -10 C) | Set temp range: -20 to 90 C
HRZ010-WS-F Type: Pump & refrigerator inverter | Circulating fluid: Fluorinated fluid | Cooling capacity: 10 kW (4 kW at -10 C) | Set temp range: -20 to 90 C
HRZ002-W1S-F Type: Pump & refrigerator inverter | Circulating fluid: 60% ethylene glycol | Cooling capacity: 2 kW | Set temp range: -10 to 90 C
HRZ004-W1S-F Type: Pump & refrigerator inverter | Circulating fluid: 60% ethylene glycol | Cooling capacity: 4 kW (2 kW at -10 C) | Set temp range: -20 to 90 C
HRZ008-W1S-F Type: Pump & refrigerator inverter | Circulating fluid: 60% ethylene glycol | Cooling capacity: 8 kW (4 kW at -10 C) | Set temp range: -20 to 90 C
HRZ010-W1S-F Type: Pump & refrigerator inverter | Circulating fluid: 60% ethylene glycol | Cooling capacity: 10 kW (4 kW at -10 C) | Set temp range: -20 to 90 C
HRZ002-W2S-F Type: Pump & refrigerator inverter | Circulating fluid: Clear water / DI water | Cooling capacity: 2 kW | Set temp range: 10 to 60 C
HRZ004-W2S-F Type: Pump & refrigerator inverter | Circulating fluid: Clear water / DI water | Cooling capacity: 4 kW | Set temp range: 10 to 60 C
HRZ008-W2S-F Type: Pump & refrigerator inverter | Circulating fluid: Clear water / DI water | Cooling capacity: 8 kW | Set temp range: 10 to 60 C
HRZ010-W2S-F Type: Pump & refrigerator inverter | Circulating fluid: Clear water / DI water | Cooling capacity: 10 kW | Set temp range: 10 to 60 C
HRZ008-L-F Type: Pump inverter | Circulating fluid: Fluorinated fluid | Cooling capacity: 8 kW (at -10 C) | Set temp range: -20 to 40 C
HRZ008-L1-F Type: Pump inverter | Circulating fluid: 60% ethylene glycol | Cooling capacity: 8 kW (at -10 C) | Set temp range: -20 to 40 C
ChillersSMC
14 product codes available in this family
Sourced direct from KoreaExport-ready supplyCompetitive pricing
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SMC HRZ-F Thermo-Chiller (Inverter Type, R410A/R448A, 2 to 10 kW)

Brand SMC·Chillers

Available part numbers (14)

HRZ002-WS-F, HRZ004-WS-F, HRZ008-WS-F, HRZ010-WS-F, HRZ002-W1S-F, HRZ004-W1S-F, HRZ008-W1S-F, HRZ010-W1S-F, HRZ002-W2S-F, HRZ004-W2S-F + 4 more — see full table ↓

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Send the SMC part numbers and quantities through our RFQ form or to info@prosourcemro.com. We confirm price, availability and lead time within 1 business day — no account needed.

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Product codeSpec
HRZ002-WS-FType: Pump & refrigerator inverter | Circulating fluid: Fluorinated fluid | Cooling capacity: 2 kW (0.5 kW at -10 C) | Set temp range: -10 to 90 C
HRZ004-WS-FType: Pump & refrigerator inverter | Circulating fluid: Fluorinated fluid | Cooling capacity: 4 kW (2 kW at -10 C) | Set temp range: -20 to 90 C
HRZ008-WS-FType: Pump & refrigerator inverter | Circulating fluid: Fluorinated fluid | Cooling capacity: 8 kW (4 kW at -10 C) | Set temp range: -20 to 90 C
HRZ010-WS-FType: Pump & refrigerator inverter | Circulating fluid: Fluorinated fluid | Cooling capacity: 10 kW (4 kW at -10 C) | Set temp range: -20 to 90 C
HRZ002-W1S-FType: Pump & refrigerator inverter | Circulating fluid: 60% ethylene glycol | Cooling capacity: 2 kW | Set temp range: -10 to 90 C
HRZ004-W1S-FType: Pump & refrigerator inverter | Circulating fluid: 60% ethylene glycol | Cooling capacity: 4 kW (2 kW at -10 C) | Set temp range: -20 to 90 C
HRZ008-W1S-FType: Pump & refrigerator inverter | Circulating fluid: 60% ethylene glycol | Cooling capacity: 8 kW (4 kW at -10 C) | Set temp range: -20 to 90 C
HRZ010-W1S-FType: Pump & refrigerator inverter | Circulating fluid: 60% ethylene glycol | Cooling capacity: 10 kW (4 kW at -10 C) | Set temp range: -20 to 90 C
HRZ002-W2S-FType: Pump & refrigerator inverter | Circulating fluid: Clear water / DI water | Cooling capacity: 2 kW | Set temp range: 10 to 60 C
HRZ004-W2S-FType: Pump & refrigerator inverter | Circulating fluid: Clear water / DI water | Cooling capacity: 4 kW | Set temp range: 10 to 60 C
HRZ008-W2S-FType: Pump & refrigerator inverter | Circulating fluid: Clear water / DI water | Cooling capacity: 8 kW | Set temp range: 10 to 60 C
HRZ010-W2S-FType: Pump & refrigerator inverter | Circulating fluid: Clear water / DI water | Cooling capacity: 10 kW | Set temp range: 10 to 60 C
HRZ008-L-FType: Pump inverter | Circulating fluid: Fluorinated fluid | Cooling capacity: 8 kW (at -10 C) | Set temp range: -20 to 40 C
HRZ008-L1-FType: Pump inverter | Circulating fluid: 60% ethylene glycol | Cooling capacity: 8 kW (at -10 C) | Set temp range: -20 to 40 C

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