• SMC SFC Clean Gas Filter (Non-reusable, Multi-disk, 240 L/min)
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SMC SFC Clean Gas Filter (Non-reusable, Multi-disk, 240 L/min)

SMC SFC Clean Gas Filter (Non-reusable, Multi-disk, 240 L/min)

SMC SFC100 series non-reusable multi-disk clean gas filter with high-reliability PTFE membrane (0.01 um, 99.99%) for compressed air and nitrogen in semiconductor processes, 240 L/min (ANR).

Key features

  • Multi-stage disk PTFE membrane element, filtration area 300 cm2, rated flow 240 L/min (ANR)
  • SUS316 case electropolished inside and outside; PTFE/PVDF element, PTFE O-ring
  • Helium leak 4.0x10-9 Pa m3/s or less; operating temperature up to 120 C
  • Rc, TSJ (tube swage joint) or URJ (metal gasket union ring joint) connections in 1/4 and 3/8
  • Cleaned, assembled, inspected and double-bagged (antistatic) in a clean room

Specifications

Fluid Air, nitrogen
Operating pressure Max. 0.99 MPa, vacuum 1.3x10-6 kPa
Operating temperature 5 to 120 C
Element differential pressure Max. 0.42 MPa
Element reverse differential pressure Max. 0.07 MPa
Filtration 0.01 um (99.99% capture)
Rated flow 240 L/min (ANR)
Case material SUS316 (electropolished)
Mass 0.35 to 0.49 kg
Source SMC Korea catalog SF Series (SMCKR_SFA_SFB_SFC.pdf), p. 415-417 (PDF p. 15-17)
SFC100-02 Connection: Rc1/4 female | Connection size: 1/4 | Mass: 0.35 kg
SFC100-03 Connection: Rc3/8 female | Connection size: 3/8 | Mass: 0.36 kg
SFC102-02 Connection: TSJ1/4 swage joint | Connection size: 1/4 | Mass: 0.40 kg
SFC102-03 Connection: TSJ3/8 swage joint | Connection size: 3/8 | Mass: 0.41 kg
SFC105-02 Connection: URJ1/4 ring union | Connection size: 1/4 | Mass: 0.44 kg
SFC105-03 Connection: URJ3/8 ring union | Connection size: 3/8 | Mass: 0.49 kg
FiltersSMC
6 product codes available in this family
Sourced direct from KoreaExport-ready supplyCompetitive pricing
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SMC SFC Clean Gas Filter (Non-reusable, Multi-disk, 240 L/min)

Brand SMC·Filters

Available part numbers (6)

SFC100-02, SFC100-03, SFC102-02, SFC102-03, SFC105-02, SFC105-03

How to order

Send the SMC part numbers and quantities through our RFQ form or to info@prosourcemro.com. We confirm price, availability and lead time within 1 business day — no account needed.

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Product codes & specifications
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RFQ List (0)
Product codeSpec
SFC100-02Connection: Rc1/4 female | Connection size: 1/4 | Mass: 0.35 kg
SFC100-03Connection: Rc3/8 female | Connection size: 3/8 | Mass: 0.36 kg
SFC102-02Connection: TSJ1/4 swage joint | Connection size: 1/4 | Mass: 0.40 kg
SFC102-03Connection: TSJ3/8 swage joint | Connection size: 3/8 | Mass: 0.41 kg
SFC105-02Connection: URJ1/4 ring union | Connection size: 1/4 | Mass: 0.44 kg
SFC105-03Connection: URJ3/8 ring union | Connection size: 3/8 | Mass: 0.49 kg

Need a different model, or a part not listed here? Send us your parts list →

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