• SMC SL5200 High-Purity Miniature Regulator (Springless, Single-Stage)
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SMC SL5200 High-Purity Miniature Regulator (Springless, Single-Stage)

SMC SL5200 High-Purity Miniature Regulator (Springless, Single-Stage)

SMC SL5200 series compact single-stage high-purity regulator with springless (no poppet spring in the gas path) construction, standard flow below 30 slpm.

Key features

  • High-purity SUS316L double-melt body, electropolished and passivated; precision cleaned and helium leak tested
  • Springless construction: no poppet spring in the wetted area
  • Flow below 30 slpm (HF option below 130 slpm); inlet up to 150 psig (1.0 MPa)
  • Set pressure 0.0034-0.07 to 0.007-0.7 MPa; vacuum-regulation version SL5201..A (-88 kPa to 0.07 MPa)
  • 2-port or 3-port (outlet gauge) bodies with 1/4 or 3/8 face seal or tube weld connections
  • Listed codes: gauge ports "0" (1/4 face seal male port, no gauge); gauges (V3, L, 1, H, 2, 4, 40), MPA scale, VS/TF seat, HF high-flow and panel mount (P) are ordered as suffixes

Specifications

Fluid Gases that do not corrode wetted parts
Leakage Inboard 2x10^-11, outboard 2x10^-10 Pa m3/s
Ambient and fluid temperature -40 to 71 C (no freezing)
Internal finish Ra max 0.25 um, M (options 0.18/0.13 um)
Inlet pressure Vacuum to 1.0 MPa
Internal volume 3.1 cm3
Mass 0.45 kg
Source SMC Korea catalog Process Gas Equipment (SMCKR_AP_SL_AZ_AK_BP.pdf), p. 688-689
SL5201SM2PWFV4FV4 Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 face seal female
SL5201SM2PWMV4MV4 Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 face seal male
SL5201SM2PWTW4TW4 Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 tube weld
SL5201SM2PWFV6FV6 Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 face seal female
SL5201SM2PWMV6MV6 Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 face seal male
SL5201SM2PWTW6TW6 Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 tube weld
SL5201SM3PWFV4FV40 Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 face seal female
SL5201SM3PWMV4MV40 Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 face seal male
SL5201SM3PWTW4TW40 Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 tube weld
SL5201SM3PWFV6FV60 Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 face seal female
SL5201SM3PWMV6MV60 Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 face seal male
SL5201SM3PWTW6TW60 Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 tube weld
SL5201SHM2PWFV4FV4 Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 face seal female
SL5201SHM2PWMV4MV4 Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 face seal male
SL5201SHM2PWTW4TW4 Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 tube weld
SL5201SHM2PWFV6FV6 Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 face seal female
SL5201SHM2PWMV6MV6 Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 face seal male
SL5201SHM2PWTW6TW6 Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 tube weld
SL5201SHM3PWFV4FV40 Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 face seal female
SL5201SHM3PWMV4MV40 Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 face seal male
SL5201SHM3PWTW4TW40 Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 tube weld
SL5201SHM3PWFV6FV60 Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 face seal female
SL5201SHM3PWMV6MV60 Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 face seal male
SL5201SHM3PWTW6TW60 Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 tube weld
SL5202SM2PWFV4FV4 Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 face seal female
SL5202SM2PWMV4MV4 Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 face seal male
SL5202SM2PWTW4TW4 Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 tube weld
SL5202SM2PWFV6FV6 Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 face seal female
SL5202SM2PWMV6MV6 Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 face seal male
SL5202SM2PWTW6TW6 Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 tube weld
SL5202SM3PWFV4FV40 Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 face seal female
SL5202SM3PWMV4MV40 Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 face seal male
SL5202SM3PWTW4TW40 Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 tube weld
SL5202SM3PWFV6FV60 Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 face seal female
SL5202SM3PWMV6MV60 Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 face seal male
SL5202SM3PWTW6TW60 Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 tube weld
SL5202SHM2PWFV4FV4 Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 face seal female
SL5202SHM2PWMV4MV4 Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 face seal male
SL5202SHM2PWTW4TW4 Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 tube weld
SL5202SHM2PWFV6FV6 Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 face seal female
SL5202SHM2PWMV6MV6 Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 face seal male
SL5202SHM2PWTW6TW6 Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 tube weld
SL5202SHM3PWFV4FV40 Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 face seal female
SL5202SHM3PWMV4MV40 Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 face seal male
SL5202SHM3PWTW4TW40 Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 tube weld
SL5202SHM3PWFV6FV60 Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 face seal female
SL5202SHM3PWMV6MV60 Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 face seal male
SL5202SHM3PWTW6TW60 Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 tube weld
SL5206SM2PWFV4FV4 Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 face seal female
SL5206SM2PWMV4MV4 Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 face seal male
SL5206SM2PWTW4TW4 Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 tube weld
SL5206SM2PWFV6FV6 Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 face seal female
SL5206SM2PWMV6MV6 Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 face seal male
SL5206SM2PWTW6TW6 Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 tube weld
SL5206SM3PWFV4FV40 Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 face seal female
SL5206SM3PWMV4MV40 Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 face seal male
SL5206SM3PWTW4TW40 Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 tube weld
SL5206SM3PWFV6FV60 Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 face seal female
SL5206SM3PWMV6MV60 Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 face seal male
SL5206SM3PWTW6TW60 Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 tube weld
SL5206SHM2PWFV4FV4 Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 face seal female
SL5206SHM2PWMV4MV4 Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 face seal male
SL5206SHM2PWTW4TW4 Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 tube weld
SL5206SHM2PWFV6FV6 Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 face seal female
SL5206SHM2PWMV6MV6 Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 face seal male
SL5206SHM2PWTW6TW6 Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 tube weld
SL5206SHM3PWFV4FV40 Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 face seal female
SL5206SHM3PWMV4MV40 Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 face seal male
SL5206SHM3PWTW4TW40 Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 tube weld
SL5206SHM3PWFV6FV60 Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 face seal female
SL5206SHM3PWMV6MV60 Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 face seal male
SL5206SHM3PWTW6TW60 Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 tube weld
SL5210SM2PWFV4FV4 Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 face seal female
SL5210SM2PWMV4MV4 Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 face seal male
SL5210SM2PWTW4TW4 Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 tube weld
SL5210SM2PWFV6FV6 Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 face seal female
SL5210SM2PWMV6MV6 Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 face seal male
SL5210SM2PWTW6TW6 Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 tube weld
SL5210SM3PWFV4FV40 Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 face seal female
SL5210SM3PWMV4MV40 Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 face seal male
SL5210SM3PWTW4TW40 Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 tube weld
SL5210SM3PWFV6FV60 Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 face seal female
SL5210SM3PWMV6MV60 Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 face seal male
SL5210SM3PWTW6TW60 Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 tube weld
SL5210SHM2PWFV4FV4 Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 face seal female
SL5210SHM2PWMV4MV4 Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 face seal male
SL5210SHM2PWTW4TW4 Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 tube weld
SL5210SHM2PWFV6FV6 Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 face seal female
SL5210SHM2PWMV6MV6 Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 face seal male
SL5210SHM2PWTW6TW6 Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 tube weld
SL5210SHM3PWFV4FV40 Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 face seal female
SL5210SHM3PWMV4MV40 Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 face seal male
SL5210SHM3PWTW4TW40 Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 tube weld
SL5210SHM3PWFV6FV60 Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 face seal female
SL5210SHM3PWMV6MV60 Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 face seal male
SL5210SHM3PWTW6TW60 Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 tube weld
SL5201SMA2PWFV4FV4 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 face seal female
SL5201SMA2PWMV4MV4 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 face seal male
SL5201SMA2PWTW4TW4 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 tube weld
SL5201SMA2PWFV6FV6 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 face seal female
SL5201SMA2PWMV6MV6 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 face seal male
SL5201SMA2PWTW6TW6 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 tube weld
SL5201SMA3PWFV4FV40 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 face seal female
SL5201SMA3PWMV4MV40 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 face seal male
SL5201SMA3PWTW4TW40 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 tube weld
SL5201SMA3PWFV6FV60 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 face seal female
SL5201SMA3PWMV6MV60 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 face seal male
SL5201SMA3PWTW6TW60 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 tube weld
SL5201SHMA2PWFV4FV4 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 face seal female
SL5201SHMA2PWMV4MV4 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 face seal male
SL5201SHMA2PWTW4TW4 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 tube weld
SL5201SHMA2PWFV6FV6 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 face seal female
SL5201SHMA2PWMV6MV6 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 face seal male
SL5201SHMA2PWTW6TW6 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 tube weld
SL5201SHMA3PWFV4FV40 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 face seal female
SL5201SHMA3PWMV4MV40 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 face seal male
SL5201SHMA3PWTW4TW40 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 tube weld
SL5201SHMA3PWFV6FV60 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 face seal female
SL5201SHMA3PWMV6MV60 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 face seal male
SL5201SHMA3PWTW6TW60 Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 tube weld
RegulatorsSMC
120 product codes available in this family
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SMC SL5200 High-Purity Miniature Regulator (Springless, Single-Stage)

Brand SMC·Regulators

Available part numbers (120)

SL5201SM2PWFV4FV4, SL5201SM2PWMV4MV4, SL5201SM2PWTW4TW4, SL5201SM2PWFV6FV6, SL5201SM2PWMV6MV6, SL5201SM2PWTW6TW6, SL5201SM3PWFV4FV40, SL5201SM3PWMV4MV40, SL5201SM3PWTW4TW40, SL5201SM3PWFV6FV60 + 110 more — see full table ↓

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Product codes & specifications
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RFQ List (0)
Product codeSpec
SL5201SM2PWFV4FV4Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 face seal female
SL5201SM2PWMV4MV4Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 face seal male
SL5201SM2PWTW4TW4Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 tube weld
SL5201SM2PWFV6FV6Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 face seal female
SL5201SM2PWMV6MV6Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 face seal male
SL5201SM2PWTW6TW6Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 tube weld
SL5201SM3PWFV4FV40Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 face seal female
SL5201SM3PWMV4MV40Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 face seal male
SL5201SM3PWTW4TW40Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 tube weld
SL5201SM3PWFV6FV60Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 face seal female
SL5201SM3PWMV6MV60Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 face seal male
SL5201SM3PWTW6TW60Set pressure: 0.0034 to 0.07 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 tube weld
SL5201SHM2PWFV4FV4Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 face seal female
SL5201SHM2PWMV4MV4Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 face seal male
SL5201SHM2PWTW4TW4Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 tube weld
SL5201SHM2PWFV6FV6Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 face seal female
SL5201SHM2PWMV6MV6Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 face seal male
SL5201SHM2PWTW6TW6Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 tube weld
SL5201SHM3PWFV4FV40Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 face seal female
SL5201SHM3PWMV4MV40Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 face seal male
SL5201SHM3PWTW4TW40Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 tube weld
SL5201SHM3PWFV6FV60Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 face seal female
SL5201SHM3PWMV6MV60Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 face seal male
SL5201SHM3PWTW6TW60Set pressure: 0.0034 to 0.07 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 tube weld
SL5202SM2PWFV4FV4Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 face seal female
SL5202SM2PWMV4MV4Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 face seal male
SL5202SM2PWTW4TW4Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 tube weld
SL5202SM2PWFV6FV6Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 face seal female
SL5202SM2PWMV6MV6Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 face seal male
SL5202SM2PWTW6TW6Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 tube weld
SL5202SM3PWFV4FV40Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 face seal female
SL5202SM3PWMV4MV40Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 face seal male
SL5202SM3PWTW4TW40Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 tube weld
SL5202SM3PWFV6FV60Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 face seal female
SL5202SM3PWMV6MV60Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 face seal male
SL5202SM3PWTW6TW60Set pressure: 0.0034 to 0.2 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 tube weld
SL5202SHM2PWFV4FV4Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 face seal female
SL5202SHM2PWMV4MV4Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 face seal male
SL5202SHM2PWTW4TW4Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 tube weld
SL5202SHM2PWFV6FV6Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 face seal female
SL5202SHM2PWMV6MV6Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 face seal male
SL5202SHM2PWTW6TW6Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 tube weld
SL5202SHM3PWFV4FV40Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 face seal female
SL5202SHM3PWMV4MV40Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 face seal male
SL5202SHM3PWTW4TW40Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 tube weld
SL5202SHM3PWFV6FV60Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 face seal female
SL5202SHM3PWMV6MV60Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 face seal male
SL5202SHM3PWTW6TW60Set pressure: 0.0034 to 0.2 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 tube weld
SL5206SM2PWFV4FV4Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 face seal female
SL5206SM2PWMV4MV4Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 face seal male
SL5206SM2PWTW4TW4Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 tube weld
SL5206SM2PWFV6FV6Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 face seal female
SL5206SM2PWMV6MV6Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 face seal male
SL5206SM2PWTW6TW6Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 tube weld
SL5206SM3PWFV4FV40Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 face seal female
SL5206SM3PWMV4MV40Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 face seal male
SL5206SM3PWTW4TW40Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 tube weld
SL5206SM3PWFV6FV60Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 face seal female
SL5206SM3PWMV6MV60Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 face seal male
SL5206SM3PWTW6TW60Set pressure: 0.007 to 0.4 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 tube weld
SL5206SHM2PWFV4FV4Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 face seal female
SL5206SHM2PWMV4MV4Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 face seal male
SL5206SHM2PWTW4TW4Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 tube weld
SL5206SHM2PWFV6FV6Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 face seal female
SL5206SHM2PWMV6MV6Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 face seal male
SL5206SHM2PWTW6TW6Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 tube weld
SL5206SHM3PWFV4FV40Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 face seal female
SL5206SHM3PWMV4MV40Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 face seal male
SL5206SHM3PWTW4TW40Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 tube weld
SL5206SHM3PWFV6FV60Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 face seal female
SL5206SHM3PWMV6MV60Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 face seal male
SL5206SHM3PWTW6TW60Set pressure: 0.007 to 0.4 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 tube weld
SL5210SM2PWFV4FV4Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 face seal female
SL5210SM2PWMV4MV4Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 face seal male
SL5210SM2PWTW4TW4Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 tube weld
SL5210SM2PWFV6FV6Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 face seal female
SL5210SM2PWMV6MV6Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 face seal male
SL5210SM2PWTW6TW6Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 tube weld
SL5210SM3PWFV4FV40Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 face seal female
SL5210SM3PWMV4MV40Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 face seal male
SL5210SM3PWTW4TW40Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 tube weld
SL5210SM3PWFV6FV60Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 face seal female
SL5210SM3PWMV6MV60Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 face seal male
SL5210SM3PWTW6TW60Set pressure: 0.007 to 0.7 MPa | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 tube weld
SL5210SHM2PWFV4FV4Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 face seal female
SL5210SHM2PWMV4MV4Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 face seal male
SL5210SHM2PWTW4TW4Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 tube weld
SL5210SHM2PWFV6FV6Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 face seal female
SL5210SHM2PWMV6MV6Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 face seal male
SL5210SHM2PWTW6TW6Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 tube weld
SL5210SHM3PWFV4FV40Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 face seal female
SL5210SHM3PWMV4MV40Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 face seal male
SL5210SHM3PWTW4TW40Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 tube weld
SL5210SHM3PWFV6FV60Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 face seal female
SL5210SHM3PWMV6MV60Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 face seal male
SL5210SHM3PWTW6TW60Set pressure: 0.007 to 0.7 MPa | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 tube weld
SL5201SMA2PWFV4FV4Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 face seal female
SL5201SMA2PWMV4MV4Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 face seal male
SL5201SMA2PWTW4TW4Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 2 ports | Connection: 1/4 tube weld
SL5201SMA2PWFV6FV6Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 face seal female
SL5201SMA2PWMV6MV6Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 face seal male
SL5201SMA2PWTW6TW6Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 2 ports | Connection: 3/8 tube weld
SL5201SMA3PWFV4FV40Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 face seal female
SL5201SMA3PWMV4MV40Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 face seal male
SL5201SMA3PWTW4TW40Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 1/4 tube weld
SL5201SMA3PWFV6FV60Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 face seal female
SL5201SMA3PWMV6MV60Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 face seal male
SL5201SMA3PWTW6TW60Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: SUS316L (standard) | Ports: 3 ports (gauge port) | Connection: 3/8 tube weld
SL5201SHMA2PWFV4FV4Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 face seal female
SL5201SHMA2PWMV4MV4Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 face seal male
SL5201SHMA2PWTW4TW4Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 1/4 tube weld
SL5201SHMA2PWFV6FV6Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 face seal female
SL5201SHMA2PWMV6MV6Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 face seal male
SL5201SHMA2PWTW6TW6Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 2 ports | Connection: 3/8 tube weld
SL5201SHMA3PWFV4FV40Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 face seal female
SL5201SHMA3PWMV4MV40Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 face seal male
SL5201SHMA3PWTW4TW40Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 1/4 tube weld
SL5201SHMA3PWFV6FV60Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 face seal female
SL5201SHMA3PWMV6MV60Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 face seal male
SL5201SHMA3PWTW6TW60Set pressure: -88 kPa to 0.07 MPa (vacuum regulation) | Material: Ni-Cr-Mo poppet | Ports: 3 ports (gauge port) | Connection: 3/8 tube weld

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