• SMC XGT High Vacuum Slit Valve (200/300 mm Wafer)
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SMC XGT High Vacuum Slit Valve (200/300 mm Wafer)

SMC XGT High Vacuum Slit Valve (200/300 mm Wafer)

SMC XGT high vacuum slit valve (gate valve) between load-lock and transfer chambers of semiconductor equipment, for 200 mm and 300 mm wafers.

Key features

  • L-motion gate with end lock: holds open or closed position at emergency stop
  • Service life 2 million cycles (SMC test conditions)
  • Cassette type for quick gate maintenance, or no-cassette type
  • Gate O-ring FKM or Kalrez 4079
  • Auto switch D-A93 with lead, multi-connector or D-sub (A/C/F suffix), not expanded

Specifications

Operating pressure Atmospheric to 10^-6 Pa(abs)
Differential pressure 4 kPa or less
Pilot pressure 0.45-0.6 MPa
External leakage 6.5x10^-11 Pa m3/s
Internal leakage 6.5x10^-10 (FKM), 6.5x10^-9 (Kalrez) Pa m3/s
Fluid Inert gas
Materials Bellows AM350, gate A6063, body A5052
Mounting Vertical
Source SMC Korea XGT catalog (SMCKR_XGT.pdf), p. 3-4
XGT221-32222-1 Valve size: 2-axis bellows, 200 mm wafer | Valve type: No cassette | Opening: 32 x 222 mm | Gate O ring: FKM
XGT221-32222-2 Valve size: 2-axis bellows, 200 mm wafer | Valve type: No cassette | Opening: 32 x 222 mm | Gate O ring: Kalrez 4079
XGT221-32222-F1 Valve size: 2-axis bellows, 200 mm wafer | Valve type: No cassette | Opening: 32 x 222 mm | Gate O ring: FKM (std FKM equiv.)
XGT222-32222-1 Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 32 x 222 mm | Gate O ring: FKM
XGT222-32222-2 Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 32 x 222 mm | Gate O ring: Kalrez 4079
XGT222-32222-F1 Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 32 x 222 mm | Gate O ring: FKM (std FKM equiv.)
XGT222-32222-F2 Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 32 x 222 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)
XGT221-46236-1 Valve size: 2-axis bellows, 200 mm wafer | Valve type: No cassette | Opening: 46 x 236 mm | Gate O ring: FKM
XGT221-46236-2 Valve size: 2-axis bellows, 200 mm wafer | Valve type: No cassette | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079
XGT221-46236-F1 Valve size: 2-axis bellows, 200 mm wafer | Valve type: No cassette | Opening: 46 x 236 mm | Gate O ring: FKM (std FKM equiv.)
XGT222-46236-1 Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 46 x 236 mm | Gate O ring: FKM
XGT222-46236-2 Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079
XGT222-46236-F1 Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 46 x 236 mm | Gate O ring: FKM (std FKM equiv.)
XGT222-46236-F2 Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)
XGT223-46236-1 Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Half MESK | Opening: 46 x 236 mm | Gate O ring: FKM
XGT223-46236-2 Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Half MESK | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079
XGT223-46236-F1 Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Half MESK | Opening: 46 x 236 mm | Gate O ring: FKM (std FKM equiv.)
XGT223-46236-F2 Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Half MESK | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)
XGT224-46236-1 Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Full MESK | Opening: 46 x 236 mm | Gate O ring: FKM
XGT224-46236-2 Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Full MESK | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079
XGT224-46236-F1 Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Full MESK | Opening: 46 x 236 mm | Gate O ring: FKM (std FKM equiv.)
XGT224-46236-F2 Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Full MESK | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)
XGT311-50336-1 Valve size: 1-axis bellows, 300 mm wafer | Valve type: No cassette | Opening: 50 x 336 mm | Gate O ring: FKM
XGT311-50336-2 Valve size: 1-axis bellows, 300 mm wafer | Valve type: No cassette | Opening: 50 x 336 mm | Gate O ring: Kalrez 4079
XGT311-50336-F1 Valve size: 1-axis bellows, 300 mm wafer | Valve type: No cassette | Opening: 50 x 336 mm | Gate O ring: FKM (std FKM equiv.)
XGT311-50336-F2 Valve size: 1-axis bellows, 300 mm wafer | Valve type: No cassette | Opening: 50 x 336 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)
XGT312-50336-1 Valve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, standard | Opening: 50 x 336 mm | Gate O ring: FKM
XGT312-50336-2 Valve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, standard | Opening: 50 x 336 mm | Gate O ring: Kalrez 4079
XGT312-50336-F1 Valve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, standard | Opening: 50 x 336 mm | Gate O ring: FKM (std FKM equiv.)
XGT312-50336-F2 Valve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, standard | Opening: 50 x 336 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)
XGT313-50336-1 Valve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, Half MESK | Opening: 50 x 336 mm | Gate O ring: FKM
XGT313-50336-2 Valve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, Half MESK | Opening: 50 x 336 mm | Gate O ring: Kalrez 4079
XGT313-50336-F1 Valve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, Half MESK | Opening: 50 x 336 mm | Gate O ring: FKM (std FKM equiv.)
XGT313-50336-F2 Valve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, Half MESK | Opening: 50 x 336 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)
High Vacuum ValvesSMC
34 product codes available in this family
Sourced direct from KoreaExport-ready supplyCompetitive pricing
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SMC XGT High Vacuum Slit Valve (200/300 mm Wafer)

Brand SMC·High Vacuum Valves

Available part numbers (34)

XGT221-32222-1, XGT221-32222-2, XGT221-32222-F1, XGT222-32222-1, XGT222-32222-2, XGT222-32222-F1, XGT222-32222-F2, XGT221-46236-1, XGT221-46236-2, XGT221-46236-F1 + 24 more — see full table ↓

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Product codes & specifications
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Product codeSpec
XGT221-32222-1Valve size: 2-axis bellows, 200 mm wafer | Valve type: No cassette | Opening: 32 x 222 mm | Gate O ring: FKM
XGT221-32222-2Valve size: 2-axis bellows, 200 mm wafer | Valve type: No cassette | Opening: 32 x 222 mm | Gate O ring: Kalrez 4079
XGT221-32222-F1Valve size: 2-axis bellows, 200 mm wafer | Valve type: No cassette | Opening: 32 x 222 mm | Gate O ring: FKM (std FKM equiv.)
XGT222-32222-1Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 32 x 222 mm | Gate O ring: FKM
XGT222-32222-2Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 32 x 222 mm | Gate O ring: Kalrez 4079
XGT222-32222-F1Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 32 x 222 mm | Gate O ring: FKM (std FKM equiv.)
XGT222-32222-F2Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 32 x 222 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)
XGT221-46236-1Valve size: 2-axis bellows, 200 mm wafer | Valve type: No cassette | Opening: 46 x 236 mm | Gate O ring: FKM
XGT221-46236-2Valve size: 2-axis bellows, 200 mm wafer | Valve type: No cassette | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079
XGT221-46236-F1Valve size: 2-axis bellows, 200 mm wafer | Valve type: No cassette | Opening: 46 x 236 mm | Gate O ring: FKM (std FKM equiv.)
XGT222-46236-1Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 46 x 236 mm | Gate O ring: FKM
XGT222-46236-2Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079
XGT222-46236-F1Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 46 x 236 mm | Gate O ring: FKM (std FKM equiv.)
XGT222-46236-F2Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, standard | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)
XGT223-46236-1Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Half MESK | Opening: 46 x 236 mm | Gate O ring: FKM
XGT223-46236-2Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Half MESK | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079
XGT223-46236-F1Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Half MESK | Opening: 46 x 236 mm | Gate O ring: FKM (std FKM equiv.)
XGT223-46236-F2Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Half MESK | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)
XGT224-46236-1Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Full MESK | Opening: 46 x 236 mm | Gate O ring: FKM
XGT224-46236-2Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Full MESK | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079
XGT224-46236-F1Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Full MESK | Opening: 46 x 236 mm | Gate O ring: FKM (std FKM equiv.)
XGT224-46236-F2Valve size: 2-axis bellows, 200 mm wafer | Valve type: Cassette, Full MESK | Opening: 46 x 236 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)
XGT311-50336-1Valve size: 1-axis bellows, 300 mm wafer | Valve type: No cassette | Opening: 50 x 336 mm | Gate O ring: FKM
XGT311-50336-2Valve size: 1-axis bellows, 300 mm wafer | Valve type: No cassette | Opening: 50 x 336 mm | Gate O ring: Kalrez 4079
XGT311-50336-F1Valve size: 1-axis bellows, 300 mm wafer | Valve type: No cassette | Opening: 50 x 336 mm | Gate O ring: FKM (std FKM equiv.)
XGT311-50336-F2Valve size: 1-axis bellows, 300 mm wafer | Valve type: No cassette | Opening: 50 x 336 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)
XGT312-50336-1Valve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, standard | Opening: 50 x 336 mm | Gate O ring: FKM
XGT312-50336-2Valve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, standard | Opening: 50 x 336 mm | Gate O ring: Kalrez 4079
XGT312-50336-F1Valve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, standard | Opening: 50 x 336 mm | Gate O ring: FKM (std FKM equiv.)
XGT312-50336-F2Valve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, standard | Opening: 50 x 336 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)
XGT313-50336-1Valve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, Half MESK | Opening: 50 x 336 mm | Gate O ring: FKM
XGT313-50336-2Valve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, Half MESK | Opening: 50 x 336 mm | Gate O ring: Kalrez 4079
XGT313-50336-F1Valve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, Half MESK | Opening: 50 x 336 mm | Gate O ring: FKM (std FKM equiv.)
XGT313-50336-F2Valve size: 1-axis bellows, 300 mm wafer | Valve type: Cassette, Half MESK | Opening: 50 x 336 mm | Gate O ring: Kalrez 4079 (std FKM equiv.)

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