Skip to product information
1 of 1

SMC XLH High Vacuum L-Type Valve (Manual, Bellows Seal, 16-50)

SMC XLH High Vacuum L-Type Valve (Manual, Bellows Seal, 16-50)

SMC XLH hand-operated aluminum high vacuum L-type valve with bellows seal, KF flange sizes 16 to 50.

Key features

  • Manual handle operation, no pilot air required
  • SUS316L bellows seal, aluminum alloy body
  • Heater option for 100 C (H4) or 120 C (H5) body heating
  • Seal material change (EPDM, Kalrez, Chemraz, VMQ, ULTIC ARMOR etc.) via -X suffix

Specifications

Operation Manual
Fluid Inert gas under vacuum
Body material Aluminum alloy (A6063)
Surface treatment Hard anodized outside, untreated inside
Operating temperature 5-150 C
Operating pressure 1x10^-6 Pa(abs) to atmospheric
Flange KF (NW)
Leakage (FKM) Internal 1.3x10^-10, external 1.3x10^-11 Pa m3/s
Operating torque 0.1 (16) to 0.5 (50) N m or less
Source SMC Korea XL catalog (SMCKR_XL.pdf), p. 42
XLH-16 Flange size: KF16 | Heater: None | Conductance: 5 L/s
XLH-25 Flange size: KF25 | Heater: None | Conductance: 14 L/s
XLH-25H5 Flange size: KF25 | Heater: 120 C heater | Conductance: 14 L/s
XLH-40 Flange size: KF40 | Heater: None | Conductance: 45 L/s
XLH-40H4 Flange size: KF40 | Heater: 100 C heater | Conductance: 45 L/s
XLH-40H5 Flange size: KF40 | Heater: 120 C heater | Conductance: 45 L/s
XLH-50 Flange size: KF50 | Heater: None | Conductance: 80 L/s
XLH-50H4 Flange size: KF50 | Heater: 100 C heater | Conductance: 80 L/s
XLH-50H5 Flange size: KF50 | Heater: 120 C heater | Conductance: 80 L/s
High Vacuum ValvesSMC
9 product codes available in this family
Sourced direct from KoreaExport-ready supplyCompetitive pricing

Need a different model, or a part not listed here? Send us your parts list →

SMC XLH High Vacuum L-Type Valve (Manual, Bellows Seal, 16-50)

Brand SMC·High Vacuum Valves

Available part numbers (9)

XLH-16, XLH-25, XLH-25H5, XLH-40, XLH-40H4, XLH-40H5, XLH-50, XLH-50H4, XLH-50H5

How to order

Send the SMC part numbers and quantities through our RFQ form or to info@prosourcemro.com. We confirm price, availability and lead time within 1 business day — no account needed.

RFQ List 0 →
View full details
Product codes & specifications
0 selected
RFQ List (0)
Product codeSpec
XLH-16Flange size: KF16 | Heater: None | Conductance: 5 L/s
XLH-25Flange size: KF25 | Heater: None | Conductance: 14 L/s
XLH-25H5Flange size: KF25 | Heater: 120 C heater | Conductance: 14 L/s
XLH-40Flange size: KF40 | Heater: None | Conductance: 45 L/s
XLH-40H4Flange size: KF40 | Heater: 100 C heater | Conductance: 45 L/s
XLH-40H5Flange size: KF40 | Heater: 120 C heater | Conductance: 45 L/s
XLH-50Flange size: KF50 | Heater: None | Conductance: 80 L/s
XLH-50H4Flange size: KF50 | Heater: 100 C heater | Conductance: 80 L/s
XLH-50H5Flange size: KF50 | Heater: 120 C heater | Conductance: 80 L/s

Need a different model, or a part not listed here? Send us your parts list →