SMC XVD Two-Stage Control Valve (Vent/Supply Line, 1/4)

SMC XVD two-stage supply control valve that vents a vacuum chamber slowly first, then at full flow, to prevent particle stirring.

Key features

Valve and needle valve integrated: piping space 1/4 of previous product
Metal diaphragm seat greatly reduces particle generation
Both initial and main supply flow are adjustable
Fitting for VCR or Swagelok, 1/4 in

Specifications

Valve type	Single acting (N.C.)
Port size	1/4 in
Orifice	3 mm
Effective area	Main 4.6 mm2, initial 0.2-4.6 mm2
Operating pressure	0.2 MPa(G) to 1x10^-6 Pa
External leakage	1.3x10^-11 Pa m3/s
Durability	5 million cycles
Source	SMC Korea XVD catalog (SMCKR_XVD.pdf), p. 1-2

XVD2-02V		Fitting: VCR \| Internal leakage: 1.3x10^-11 Pa m3/s
XVD2-02S		Fitting: Swagelok \| Internal leakage: 1.3x10^-10 Pa m3/s

High Vacuum ValvesSMC

2 product codes available in this family

Sourced direct from KoreaExport-ready supplyCompetitive pricing

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SMC XVD Two-Stage Control Valve (Vent/Supply Line, 1/4)

Brand SMC·High Vacuum Valves

Available part numbers (2)

XVD2-02V, XVD2-02S

How to order

Send the SMC part numbers and quantities through our RFQ form or to info@prosourcemro.com. We confirm price, availability and lead time within 1 business day — no account needed.