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TPC Mechatronics TAN Series XY-Theta Alignment Stage (100-1200 mm Table)

TPC Mechatronics TAN Series XY-Theta Alignment Stage (100-1200 mm Table)

The TAN Series is an ultra-thin alignment stage that combines two linear axes (XY) with rotary (theta) motion in one unit.

Key features

  • Table sizes range from 100 x 100 mm to 1200 x 1200 mm with load capacities from 5 to 300 kgf
  • The high-rigidity structure uses cross-roller bearings and LM guides, minimizes backlash and play, and applies anti-vibration technology
  • Stages are available with 3-axis or 4-axis ball screw drive
  • Typical applications are semiconductor, PCB and LCD panel manufacturing and inspection equipment

Specifications

Axes X, Y, Theta
TPC Mechatronics TAN Series XY-Theta Alignment Stage (100-1200 mm Table) reference 2
TAN-0100 Load capacity: 5 kgf | Stroke: XY ±5 / T ±5° | Repeatability: ± 3 μm | Motor: 100 W | Table size (W x D): 100 x 100 mm | Overall size (W x D x H): 180 x 200 x 58 mm | Axes: X, Y, Theta
TAN-0200 Load capacity: 15 kgf | Stroke: XY ±10 / T ±4.5° | Repeatability: ± 3 μm | Motor: 100 W | Table size (W x D): 200 x 200 mm | Overall size (W x D x H): 350 x 350 x 80 mm | Axes: X, Y, Theta
TAN-0300 Load capacity: 50 kgf | Stroke: XY ±10 / T ±4.5° | Repeatability: ± 3 μm | Motor: 100 W | Table size (W x D): 300 x 300 mm | Overall size (W x D x H): 450 x 450 x 84 mm | Axes: X, Y, Theta
TAN-0400 Load capacity: 50 kgf | Stroke: XY ±15 / T ±5° | Repeatability: ± 3 μm | Motor: 100 W | Table size (W x D): 400 x 400 mm | Overall size (W x D x H): 550 x 550 x 90 mm | Axes: X, Y, Theta
TAN-0500 Load capacity: 80 kgf | Stroke: XY ±20 / T ±5° | Repeatability: ± 6 μm | Motor: 200 W | Table size (W x D): 500 x 500 mm | Overall size (W x D x H): 650 x 650 x 110 mm | Axes: X, Y, Theta
TAN-0600 Load capacity: 100 kgf | Stroke: XY ±25 / T ±5° | Repeatability: ± 6 μm | Motor: 200 W | Table size (W x D): 600 x 600 mm | Overall size (W x D x H): 700 x 700 x 110 mm | Axes: X, Y, Theta
TAN-0700 Load capacity: 100 kgf | Stroke: XY ±25 / T ±3° | Repeatability: ± 8 μm | Motor: 200 W | Table size (W x D): 700 x 700 mm | Overall size (W x D x H): 800 x 800 x 110 mm | Axes: X, Y, Theta
TAN-0800 Load capacity: 200 kgf | Stroke: XY ±25 / T ±3° | Repeatability: ± 5 μm | Motor: 400 W | Table size (W x D): 800 x 800 mm | Overall size (W x D x H): 900 x 900 x 130 mm | Axes: X, Y, Theta
TAN-0900 Load capacity: 200 kgf | Stroke: XY ±25 / T ±2.5° | Repeatability: ± 5 μm | Motor: 400 W | Table size (W x D): 900 x 900 mm | Overall size (W x D x H): 1000 x 1000 x 130 mm | Axes: X, Y, Theta
TAN-1000 Load capacity: 300 kgf | Stroke: XY ±40 / T ±3° | Repeatability: ± 5 μm | Motor: 400 W | Table size (W x D): 1000 x 1000 mm | Overall size (W x D x H): 1100 x 1100 x 130 mm | Axes: X, Y, Theta
TAN-1200 Load capacity: 300 kgf | Stroke: XY ±40 / T ±3° | Repeatability: ± 5 μm | Motor: 400 W | Table size (W x D): 1200 x 1200 mm | Overall size (W x D x H): 1300 x 1300 x 130 mm | Axes: X, Y, Theta
Alignment StagesTPC Mechatronics
11 product codes available in this family
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TPC Mechatronics TAN Series XY-Theta Alignment Stage (100-1200 mm Table)

Brand TPC Mechatronics·Alignment Stages

Available part numbers (11)

TAN-0100, TAN-0200, TAN-0300, TAN-0400, TAN-0500, TAN-0600, TAN-0700, TAN-0800, TAN-0900, TAN-1000 + 1 more — see full table ↓

How to order

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Product codes & specifications
TPC Mechatronics TAN Series XY-Theta Alignment Stage (100-1200 mm Table) reference 2
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Product codeSpec
TAN-0100Load capacity: 5 kgf | Stroke: XY ±5 / T ±5° | Repeatability: ± 3 μm | Motor: 100 W | Table size (W x D): 100 x 100 mm | Overall size (W x D x H): 180 x 200 x 58 mm | Axes: X, Y, Theta
TAN-0200Load capacity: 15 kgf | Stroke: XY ±10 / T ±4.5° | Repeatability: ± 3 μm | Motor: 100 W | Table size (W x D): 200 x 200 mm | Overall size (W x D x H): 350 x 350 x 80 mm | Axes: X, Y, Theta
TAN-0300Load capacity: 50 kgf | Stroke: XY ±10 / T ±4.5° | Repeatability: ± 3 μm | Motor: 100 W | Table size (W x D): 300 x 300 mm | Overall size (W x D x H): 450 x 450 x 84 mm | Axes: X, Y, Theta
TAN-0400Load capacity: 50 kgf | Stroke: XY ±15 / T ±5° | Repeatability: ± 3 μm | Motor: 100 W | Table size (W x D): 400 x 400 mm | Overall size (W x D x H): 550 x 550 x 90 mm | Axes: X, Y, Theta
TAN-0500Load capacity: 80 kgf | Stroke: XY ±20 / T ±5° | Repeatability: ± 6 μm | Motor: 200 W | Table size (W x D): 500 x 500 mm | Overall size (W x D x H): 650 x 650 x 110 mm | Axes: X, Y, Theta
TAN-0600Load capacity: 100 kgf | Stroke: XY ±25 / T ±5° | Repeatability: ± 6 μm | Motor: 200 W | Table size (W x D): 600 x 600 mm | Overall size (W x D x H): 700 x 700 x 110 mm | Axes: X, Y, Theta
TAN-0700Load capacity: 100 kgf | Stroke: XY ±25 / T ±3° | Repeatability: ± 8 μm | Motor: 200 W | Table size (W x D): 700 x 700 mm | Overall size (W x D x H): 800 x 800 x 110 mm | Axes: X, Y, Theta
TAN-0800Load capacity: 200 kgf | Stroke: XY ±25 / T ±3° | Repeatability: ± 5 μm | Motor: 400 W | Table size (W x D): 800 x 800 mm | Overall size (W x D x H): 900 x 900 x 130 mm | Axes: X, Y, Theta
TAN-0900Load capacity: 200 kgf | Stroke: XY ±25 / T ±2.5° | Repeatability: ± 5 μm | Motor: 400 W | Table size (W x D): 900 x 900 mm | Overall size (W x D x H): 1000 x 1000 x 130 mm | Axes: X, Y, Theta
TAN-1000Load capacity: 300 kgf | Stroke: XY ±40 / T ±3° | Repeatability: ± 5 μm | Motor: 400 W | Table size (W x D): 1000 x 1000 mm | Overall size (W x D x H): 1100 x 1100 x 130 mm | Axes: X, Y, Theta
TAN-1200Load capacity: 300 kgf | Stroke: XY ±40 / T ±3° | Repeatability: ± 5 μm | Motor: 400 W | Table size (W x D): 1200 x 1200 mm | Overall size (W x D x H): 1300 x 1300 x 130 mm | Axes: X, Y, Theta

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